误差运动对精密轴系测角精度的影响机理及误差修正技术研究

Precision axis is viewed to as the core component of Laser Tracker, Total station, Precision Turntable and Articulated Arm Coordinate Measuring Machine(AACMM) etc. whose measurement accuracy has been directly influenced on measurement angular accuracy of precision axis. Firstly, a new measurement angular error correction model of precision axis is established by analyzing the influence mechanism of grating eccentricity and error motion of precision axis for measuring angular accuracy; Secondly, the precision test technology for error motion of precision axis is researched based on auto-collimated principle, which measure simultaneously its radial, axial and tilt errors; Finally, a new measurement model of AACMM is also established based on the new measurement angular error correction model and by considering error motion of precision axis. The measurement accuracy of the measurement range 1800mm for AACMM is improved from 0.04mm to 0.024mm by using the calibration technology of its structural parameters in the world advanced level.The research achievements of this project which provide an innovative theoretical basis for further improving the measurement accuracy of the measurement instrument including precision axis have very important scientific significance and practical value.

精密轴系是激光跟踪仪、全站仪、精密转台、关节臂式坐标测量机等测量仪器的核心部件，轴系的测角精度直接影响测量仪器的测量精度。通过综合分析精密轴系的圆光栅安装偏心和误差运动对测角精度影响机理，建立新型测角误差修正模型；开展基于自准直原理的精密轴系误差运动的精密测试技术研究，以实现精密轴系径向、轴向和倾斜误差运动分量测试；将精密轴系的新型测角误差修正模型和误差运动应用于自主研制的关节臂式坐标测量机上，建立其全新的测量模型。采用关节臂式坐标测量机结构参数标定技术，将测量范围为1800mm的关节臂式坐标测量机的测量精度由原来0.04mm提高到0.024mm，处于世界先进水平。本项目研究成果为进一步提高该类测量仪器的测量精度提供了创新理论依据，具有重要的科学意义和实用价值。