基于人工微纳光学结构调控的非制冷PbSe中波红外光子型探测器研究

By focusing on the project guide "light field control mechanism of the uncooled middle-and long infrared detectors based on the artificial micro-nano optical structure", We'll carry out the research work of non-cooling PbSe middle-infrared detectors. On the basis of our achievement of room temperature operation and high sensitivity PbSe photonic type middle infrared detectors, we'll enhance the local field intensity and PbSe absorption coefficient, improve the signal to noise ratio, and develop room temperature operation, fast response and highly sensitive photonic type PbSe infrared detectors by regulating the interaction between the electrons and holes in PbSe active region with the surface plasmons and the middle infrared light field by intergrating of artificial micro-nano-structure SPs and photonic crystals. The detectivity of PbSe detector units is to be over 1x10E10cm Hz1 / 2/W at room temperature. 32×32 pixel infrared focal plane array will be developed with the response time less than 20 microseconds and the blind pixel rate less than 5%. The confirmatory test study of the middle infrared imaging of PbSe FPA will be performed, which will provide a solid foundation for the realization of medium and high array density and small pixel PbSe middle infrared FPA detector chips to meet the model requirements of middle infrared detection for the future aerospace technology.

围绕项目指南“基于人工微纳光学结构的非制冷中长波红外探测器光场调控机理”，开展非制冷PbSe中波红外探测器的研究，在我们已经实现的室温工作、高灵敏PbSe光子型中波红外探测器的基础上，通过集成微纳结构表面等离激元和光子晶体等人工微纳结构调控中波红外光场与PbSe有源区电子-空穴的相互作用，增强局部场强和PbSe吸收系数，提高信噪比，研制出室温工作、快速响应和高灵敏的光子型中波红外PbSe探测器，室温测试条件下PbSe单元器件探测率大于1×10E10cm·Hz1/2/W；研制32x32像素红外焦平面器件，响应时间小于20微秒，盲元率低于5%。研究PbSe FPA中波红外的成像验证工作，为实现中高面阵密度和小像元PbSe 中波红外FPA探测器芯片、满足未来航天技术对中波红外探测的型号需求奠定坚实基础。

高速、高灵敏的非制冷中长波红外探测器在航天技术、火灾预警和环境检测等领域都有着广泛的需求，该项目从构筑人工微纳光学结构思路出发，通过建立探测器基础材料制备工艺和器件关键加工技术，研制了2种基于不同物理机制、具有非制冷、高灵敏和高速响应等特点的中波红外探测单元器件:(1) PbSe薄膜光电导中波红外探测器;(2) PbTe/CdTe 和PbTe/ZnTe异质结极性界面二维电子气中波红外探测器。探测器的最大峰值探测率达到1.5x1010 Hz1/2cm/W，光脉冲响应时间（上升沿）~5 ns; 设计了以透明导电氧化物薄膜作为基质材料构造表面等离激元圆孔结构，理论模拟了表面等离激元调控中波红外光场的共振模。在建立的中波红外探测器材料和单元器件技术的基础上，我们进一步研制了16x16和32x32像元PbSe光电导中波红外探测焦平面器件，器件盲元率4%，探测器在室温下工作的噪声等效温差NEDT<50mK（@黑体500K,1000Hz），设计和研制了光电导焦平面探测器的外挂读出电路，实验搭建了光机扫描成像装置，演示了典型红外辐射体的中波红外成像。

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