基于DLC的新型阻性电极研制及其在μRWELL探测器中的应用研究

The next generation of Micro-Pattern Gaseous Detectors (MPGDs) are required to be operated stably in extremely high-rate environments with intense radiation. This places stringent demands on the resistive electrodes, a key component of modern MPGDs. The traditional resistive electrodes made by carbon pastes can hardly meet the requirements for developing the next generation of MPGDs. Therefore, it is imperative to develop high performance resistive electrodes with new materials. In this project, we propose to develop a novel type of composite resistive electrode of high performance using the magnetron sputtering deposition, try to figure out how the microcosmic structure acts on the surface resistivity by researching on the relationship between the preparing parameters and the foil properties. The resistive electrode will be sparking tolerant with excellent reliability and controllable on surface resistivity. We will also develop a high-rate Micro-Resistive WELL (μRWELL) detector with the "Cu+DLC"composite resistive electrode using a fast-grounding design. The μRWELL detector can reach a rate capability of higher than 1MHz/cm2, with an efficiency better than 98% and a spatial resolution better than 100μm for minimum ionizing particles..The studies and development work proposed in this project will not only facilitate the application of the μRWELL detector in extremely high rate environments, but also provide new technical support for development of the next generation of MPGDs.

新一代微结构气体探测器（MPGD）需在强辐照和超高计数率环境下稳定工作，这对作为关键部件的阻性电极提出了很高的要求。基于碳浆料的传统阻性电极已经难以满足新一代微结构气体探测器的发展需求，因此开发新型阻性电极显得十分迫切。本项目拟采用磁控溅射法沉积铜和类金刚石碳（DLC）的多层复合薄膜，通过研究工艺参数对膜基结合强度和内应力的影响规律以及探索微观结构对面电阻率的影响机理，开发一种抗打火能力强、可靠性好、面电阻率可控的“Cu+DLC”新型阻性电极，同时应用在阻性微井型（μRWELL）探测器上，研制出快速接地型μRWELL探测器原型并对其相关性能进行研究，实现对带电粒子的探测效率高于98%，计数率能力高于1MHz/cm2，位置分辨优于100μm的性能指标。本项目研究不仅能够有效推动μRWELL探测器在极高计数率环境下的应用，也将为新一代微结构气体探测器的发展提供新的技术支持。

新一代微结构气体探测器（Micro-Pattern Gaseous Detectors, MPGD）的研发和应用对阻性电极提出了很高的要求。本项目基于学科交叉优势，研发出一种结合力好、性能可靠的“Cu+DLC”新型复合阻性电极及其制备工艺，并系统研究了面电阻率的影响因素和规律，通过“刻度+补偿”法实现小批量制备。随后采用这种新型阻性电极设计、制作出高位置分辨的μRWELL探测器原型，其对带电粒子探测效率的实验测试值最高为97%，计数率为1MHz/cm2，位置分辨优于70um。此外，研究中针对现有快速接地技术中的工艺缺陷，与CERN开展合作并提出将DLC阻性电极与PCB板粘接再进行快速接地结构和井型放大结构制备的PEP（Patterning-Etching-Plating）工艺并完成快速接地大面积μRWELL探测器构型的设计，将为μRWELL探测器的发展和应用奠定技术基础。

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