面向空间应用的金刚石鸟巢形曲面谐振微陀螺的研究

MEMS gyroscope for space applications is a hot topic in science and engineering field all the time. To meet the requirements of harsh environment, measurement accuracy and launch/operation costs for space applications, our program proposes a unique high Q diamond birdbath curved resonator and discrete diamond drive/sense electrodes with MEMS multilayer composite fabrication and sacrificial process based on silicon. Electric stiffness compensation and focused ion beam technique will be used to reduce the frequency split and trim the misalignment. Our research of the birdbath curved resonator gyroscope focuses on vibration characteristic and dynamic equation, analysis of space applicability, 3D multilayer MEMS fabrication process, post-fabrication trimming, mixed control circuit of force balanced mode and frequency modulated mode, rotation and calibration test. This micro gyroscope has the characteristics of high precision, low CSWaP, long lifetime, shock/vibration resistance, temperature insensitive and radiation survival with structure innovation, material innovation and fabrication innovation. Our program will break the military embargo of high performance resonator gyroscope, and realize the overtaking of MEMS gyro technique. Meanwhile, the curved resonator gyroscope will be used in space ultimately.

长期以来，面向空间应用的MEMS微陀螺一直是科学界和工程界关注的热点，本项目以空间恶劣环境、陀螺精度、发射和运行成本要求为牵引，以独特的硅基曲面MEMS多层复合牺牲工艺形成高Q值金刚石鸟巢形曲面谐振结构与分离式驱动检测金刚石电极，电刚度补偿和聚焦离子束技术降低频差并修正阵型偏转，重点研究鸟巢形曲面谐振陀螺的振动特性和动力学方程、空间应用性能分析、三维曲面复合多层MEMS工艺、微陀螺结构修正工艺、力平衡/频率调制混合电路、转台测试及标定方法等，通过结构、材料、工艺融合集成创新，达成高精度、长寿命、低CSWaP、抗冲击、免疫振动、抗温变、耐辐射的目的。本项目的研究对打破国外高性能谐振微陀螺的军事禁运、实现国内MEMS微陀螺技术的弯道超车具有积极推动作用，将为曲面谐振微陀螺应用于空间航天领域打下基础。

随着我国经济的发展，我国在军事、工业、民用及消费电子等领域对高性能、小尺寸、高可靠性MEMS微陀螺的需求正变得日益迫切。本项目结合微陀螺在空间恶劣环境下的应用需求，开展了高性能金刚石鸟巢形曲面谐振微陀螺的研究，进行了鸟巢形曲面谐振微陀螺的结构设计与分析、一体化成型的三维曲面多层MEMS加工工艺、鸟巢形曲面谐振微陀螺结构修正、微陀螺数字闭环控制电路系统设计与实现以及微陀螺的测试等内容研究，突破了一体化高对称性、低粗糙度曲面谐振子制作技术、低应力金刚石薄膜制备和图形化等关键技术，成功制造出了鸟巢形曲面谐振微陀螺原理样机，获得了鸟巢型曲面谐振微陀螺加工标准工艺流程。项目发表期刊论文17篇，申请发明专利22项，其中授权专利6项，培养研究生13名，获得上海市技术发明二等奖1次，对提高我国微陀螺技术水平和推动航天事业的发展具有重要意义。

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