单点金刚石微纳切削过程的跨尺度原位测量关键技术研究

For the purpose of realizing the on-machine, multi-scale nanometrology as well as compensating the machining error during the ultra-precision machining process, a prototype apparatus has been specially designed and constructed for the purpose of rapid and large area 3D surface topography measurement. A research strategy was proposed to achieve the design of essential components, the system integration, the innovation of novel metrology techniques and its application in the ultra-precision machining process. First, the development of integrated high aspect ratio of scanning fast servo-track unit; Second, the integration of nanometrology and machining units; Third, to carry out the adaptive scanning path planning and high-speed servo tracking control strategy; The last, to realize multi-scale nanometrology, achieve multi-parameters extraction of surface morphology, decoupling, the integration algorithm, the separation of machining errors, compensation and so on. The proposal is an integration of the new instrumentation, application of novel metrology technology as well as error compensation process for the ultra-precision machining process. It will facilitate the rapid and large area nanostructures topography measurement and will open the way to on-machine surface profile measurement during the ultra-precision machining process.

本项目为实现单点金刚石微纳切削过程的跨尺度在位测量及加工误差的评价和补偿。研究内容集中在跨尺度原位测量关键基础理论与技术和面向单点金刚石微纳切削过程的应用等方面，拟采用如下研究策略：1）研究单点金刚石切削瞬态及加工微区域内的工艺参数嬗变过程的实时测量方法；2）开发在位自适应扫描路径规划及扫描探头高速随动跟踪控制技术；3）形成超精密测量单元与单点金刚石加工单元集成协同一体的跨尺度在位测量装置；4）实现微纳切削加工件表面特征形貌的跨尺度多参数的提取、解耦、表征一体化算法，跨尺度范围的测量以及加工误差分离、评定和补偿等技术。研制具有原创核心技术的面向单点金刚石微纳切削加工过程跨尺度原位测量关键技术及其仪器装备。本研究既面向超精密测量仪器装备的共性基础问题，又提供面向先进制造领域的特定仪器应用需求和技术，具有深远的学术意义和工程应用价值。

针对微纳加工过程制造精度和质量控制的重大需求，深入研究并解决了微纳加工过程的高速、跨尺度、在位微纳测量仪器关键技术，揭示了微纳表面的面型轮廓、特征几何尺寸等关键参数的测量、解耦、表征一体化理论，研究了微纳测量过程中扫描探头与元件表面之间跨尺度耦合作用规律，构建了微纳测量单元与加工单元的集成协同一体化工作方法与技术，发展了精度高、集成度好、鲁棒性强的微纳加工过程高精度测量技术及仪器，研究了单点金刚石切削加工现场在位测量仪器误差的综合评定及补偿方法，开发了具有自主知识产权的面向单点金刚石微纳切削加工过程的跨尺度在位测量技术与仪器，实现了面向超高精度复杂元件几何尺寸和三维形貌的跨尺度在位微纳测量和加工误差的综合评定，为微纳元件的制造提供了一种质量检测与控制的有效技术方法和仪器装备，本项目的研究既面向了微纳测量仪器装备的共性基础问题，又提供了面向先进制造领域的特定仪器应用需求和技术。.项目实施过程中，共发表SCI检索国际期刊论文18篇，授权发明专利6件。项目负责人排名第一获得2020年中国机械工业科学技术奖一等奖1项、2021年浙江省技术发明一等奖1项，部分成果在中国工程物理研究以及中航发涡轮研究院得到应用，经济社会效益显著。

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