压电半导体微纳电泵浦激光器件的制备及光电性能调控研究

Laser with the ultra-short pulse and high brightness has myriad applications including light source, optical communication, biological sensors and solar cells. Recently, developments of advanced optoelectronic materials and devices have result in a great hot topic of micro/nano lasers due to considerable potential for the field of new light source, optical communication, biological sensor, intelligent computer. The electrically pumped laser can realize the effective electro-optic integration and modulation with low cost. In this project, one dimensional micro/nano materials with piezoelectric effect and fine semiconductor properties are proposed to be designed and prepared. Simultaneously, high efficiency LED and LD devices are to be fabricated by taking advantages of the prepared piezoelectric semiconductors. We further study the luminescent properties and investigate the relationships between the structures/compositions and luminescent characteristics of the selected micro/nano materials. We design and prepare one dimensional micro/nano materials with different resonant cavity to study the influences of resonant cavity on the laser pumping probability. Base on the experimental results, we dedicate to clarify the correlation between the pumping modes and the emission efficiency as well as stability of the structured laser devices. Furthermore, we proposed to introduce the piezophotonotric effect on the fabricated laser device to study the disciplinarities of the piezophotonotrics and piezoeletrconics of micro/nano laser of the piezoelectric-semiconductive systems. Once refined, we envisage that the project would be expected to have great importance on the fields of integrated optical-electrical devices, for example, high resolution pressure sensor, intelligent robots, and human-machine interaction as well as the high precision components of defense and military technologies.

激光具备超短脉冲，超高亮度等特点，在诸多领域具有重要应用。近年来，随着光电材料和器件的快速发展，纳米激光器在新光源、光通讯、生物传感、智能计算机等方面有产生了许多全新而重要的应用，已成为纳米光电子学研究的重点。电泵浦激光器由电驱动，通过电子注入实现激光发射，以极低的制备成本实现有效地电光集成和调制。本项目通过设计合成具有压电效应并具有良好的半导体性能的一维微纳材料，制备高效LED和LD器件并研究其发光性能，阐明微纳材料、结构、器件构成等条件与发光性能之间的关系；设计调控一维微纳材料的结构，研究不同微纳结构作为泵浦激光器共振腔的对激光器的影响，理清材料结构与激射模式及激光发射效率和稳定性之间的关系；在此基础上探索压电光电子效应对一维微纳激光器的调控规律和机理。本项目预期在集成光电子学领域，如高分辨率应力传感与成像系统智能机器人以及人机互动以及军事和国防科技中具有重要的应用。

压电效应是压电材料在应力作用下产生形变时出现的一种内部电势的现象。压电电子学效应和压电光电子学效应是指GaN、ZnO和InN等代表的第三代半导体受到外加应力时，由于晶体中离子的极化而在材料内产生压电电势，可以有效改变金属-半导体的界面势垒和p-n结的输运性质。.本项目以ZnO、GaN、CdS、钙钛矿等压电半导体一维纳米结构的制备、光电器件制备、以及压电光子学效应研究对激光模式动态调控研究为主要目标，通过4年研究，研究了多种新型半导体光电器件，包括纳米线pn 结 LED 及 MIS 结 LED，纳米线光泵激光器件，获得了成果如下：（1）制备了多种压电半导体一维纳米结构的制备，包括ZnO、GaN、CdS、钙钛矿纳米线等；（2）采用 GaN 激光剥离和衬底转移方式得到 PET 基柔性 GaN 薄膜衬底，结合紫外曝光技术和水热法在 GaN 薄膜上外延生长出图案化高晶体质量的 ZnO 纳米线阵列，构建了p-GaN/n-ZnO 异质结的纳米线发光二极管（LED）阵列，并实现了压电光电子学效应对LED性能的调控研究与在应力成像中的应用，且该柔性 LED 阵列器件被证明具有良好的稳定性和再现性。（3）以 ZnO、GaN、CdS、钙钛矿等 WGM 等微腔为载体，结合纤锌矿结构材料固有的压电特性，通过外部机械应变引起的微腔晶体内部的离子极化，调控光学谐振腔本身的折射率，实现动态、可持续调制的激光模式输出；并有望在激光调制、光传感/开关、光子集成电路和光通讯加密等领域取得重要应用。.本研究应用了压电性质和电子学特性耦合性质，压电性质与光电子特性耦合的光激发过程，不仅开创了前沿研究领域，相关的先进技术也是目前全球新技术革命和工业革命竞争的核心技术之一，将对产业发展产生深远的影响。

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