基于动态干涉图像分析的超精密静压主轴回转精度在线测试新方法研究

The surface waviness and other technical indicators are clear and stringent requirements in ultra precision fly cutting processing. The spindle rotating accuracy is an important factor which affects the size of the surface waviness. Therefore, a new strategy for the rotary precision online testing of the ultra precision aerostatic spindle based on the dynamic interference image is proposed. Through the surface morphology test results of the standard test specimen installed on the ultra precision spindle, and the dynamic real-time analysis of interferometry and three-dimensional image, the model trajectory and the rotary precision of the spindle can be solved. The new spindle online test system is designed and built, and then the test software is also developped by the research. According to the two kinds of state of spindle rotor, idling and online processing, the influence of the ultra precision fly cutting process on the spindle rotor rotary precision is studied based on the contrast experiments. This method and the testing system developped are expected to open up a new way to test the spindle rotating accuracy, which with simply principle, high precision and wide applicability. The key technical support can be provided for further solving the key machining surface nano surface precision with surface shape, waviness and roughness. Furthermore, the project is greatly useful to optimize the precision and ultra precision shafting precision testing and equipment development, which has the extremely important theory significance and application value.

超精密飞切加工中对加工表面波纹度等技术指标均有明确而苛刻的要求，主轴回转精度是影响其大小的重要因素。因此，提出一种基于动态干涉图像实时分析的静压主轴高精度回转精度在线测试的新方法。通过对安装在超精密主轴转子端部并随其旋转的标准测试样件表面形貌进行动态干涉测量及三维立体图像的实时分析，建立主轴运动轨迹和回转精度的求解模型，设计并搭建新型主轴在线测试系统，开发测试专用软件，针对主轴转子空运行及在线加工两种状态进行系统的实验对比研究，探寻超精密飞刀切削加工过程对主轴转子回转运动精度的影响规律。该方法及测试系统有望开辟一种原理简单、适用性广的高精度主轴回转精度测试新途径，为进一步解决加工表面纳米级表面面形精度、波纹度及粗糙度等问题提供关键的技术支撑，为当前精密超精密轴系回转精度测试及装备研制提供新的研究手段并奠定理论基础，具有十分重要的理论意义和应用价值。

本项目通过建立基于干涉图像的超精密飞切加工机床主轴回转精度测试系统，分析了动态干涉仪安装固定方式、光学平晶专用装夹结构的设计及装夹精度、加工环境等关键要素对测试结果的影响规律，研究了基于激光干涉仪的主轴回转精度移相干涉测量原理。通过理论建模，建立了干涉图像与主轴转子运动规律之间的数学模型；通过动态干涉仪实时采集主轴回转时的干涉图像，并对干涉图像进行仿真分析，验证了新方法的可行性与准确性。通过与其他主轴回转精度测试方法的对比实验，对基于激光动态干涉仪的静压主轴运动精度测试新方法进行综合评价，归纳总结了新测试方法的优缺点及进一步改进措施，为研制超精密飞切加工机床静压主轴及改善加工表面质量提供了技术支撑。

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