基于多波长飞秒激光的层合连接器件精确刻蚀机理研究

The connectors are the important parts for the electronic and communication equipment，which are laminated by the multi-layer material generally. Laser processing technology has been used to etch all kinds of laminated connectors’ multi-layers in order to make it easy to connect. As the products become more and more light and fine, the requirements for connectors have become more sophisticated. A newly precise etching method of laminating connectors based on multi-wavelength femtosecond laser is coming up with in this application. Firstly, the law of laminating materials’ mass transfer and heat transfer is has been researched to verify the diverse removing performance of the different wavelengths femtosecond lasers on materials, then use different wavelengths’ lasers to process one layer of connectors and no harm to the adjacent layers. Secondly, the optional performance transformation technology of laser process on the laminating is utilized to explore the etching micro-mechanism of different wavelengths and pulses, which can reveal the dimension limit of the laminating connectors’ precision etching. Moreover, the exact matches of the process parameters and material removal, as well as the effective control of dimensional accuracy are realized by online monitoring monitor of the high-speed contour graph. What’s more, the micro-mechanism’s characteristic of the etched surface and laminated surface have been investigated, and its relation mechanism with process parameters is established to reveal the regulation mechanism of the laser process’ main parameters with regards to connectors’ properties. The advantages of this program such as high machining precision and efficiency, etc. can be widely spread to a variety of industries including miniaturization, automation, greenization and informatization of the cars, computers, and their peripherals, communication, industrial equipment, aerospace and military equipment etc. and help them to improve in their areas respectively.

连接器是电子和通讯设备中的重要部件，一般由多层材料层合而成。目前已采用激光逐层刻蚀层合连接器件以便于连接。随着产品轻巧化、精细化的发展，对连接器的要求也更精密。本申请提出了一种基于多波长飞秒激光的层合连接器精确刻蚀的新方法。拟研究层合材料的传质、传热规律，探明不同波长飞秒激光对材料的相异去除性能，采用不同波段激光加工连接器件的某层而不损伤相邻层；利用层合界面激光加工选择性性能转变技术，探索飞秒激光波长选择和脉冲序列设计提高精确刻蚀精度的微观机理，揭示层合器件精确刻蚀的尺度极限；通过高速轮廓仪在线检测，实现加工工艺参数与去除量的精确匹配和尺寸精度的有效控制；研究刻蚀表面和层合界面的微观结构特征，建立其与加工参数之间的关联机制，揭示激光加工主控参数对连接器各项性能的调控机理。该方案加工精度高，效率高，可促进汽车、电脑及其外设、通信、工业设备和航天及军用设备的微型化、自动化、绿色化、信息化水平。

连接器是电子和通讯设备中的重要部件，一般由多层材料层合而成。随着产品轻巧化、精细化的发展，对连接器的要求也更精密。本项目提出了一种基于多波长飞秒激光的层合连接器精确刻蚀的新方法，通过研究层合材料的传质、传热规律，探明不同波长飞秒激光对材料的相异去除性能，采用不同波段激光加工连接器件的某层而不损伤相邻层，飞秒激光与金属材料相互作用时，金属过热液体会产生蒸发以及相变爆炸现象，与高分子材料相互作用时主要表现为多光子吸收烧蚀，利用过热液体的蒸发和相变爆炸以及烧蚀深度对加工阈值进行测算；其次进行飞秒激光烧蚀金属的数值模拟，以双温模型为基础，探究不同因素对电子晶格温度变化的影响以及产生变化的原因；利用层合界面激光加工选择性性能转变技术，探索飞秒激光波长选择和脉冲序列设计提高精确刻蚀精度的微观机理，揭示层合器件精确刻蚀的尺度极限；通过高速轮廓仪在线检测，实现加工工艺参数与去除量的精确匹配和尺寸精度的有效控制；研究刻蚀表面和层合界面的微观结构特征，建立其与加工参数之间的关联机制，揭示激光加工主控参数对连接器各项性能的调控机理。本项目实现了高精度的“冷”加工效果，利用飞秒激光直接刻蚀覆铜板制作导电线路，进行微细电路迹线成形的初步探索；最后进行了整体线路和微孔加工成形和分析，结合前面的打孔最优工艺参数，选择优化后的工艺参数，可以加工出高质量的微细线路和微孔。尤其是当线路宽度和线路间距大于45μm时，连接器的精确刻蚀可满足预设角度，拐角处铜箔能完全去除且形貌良好。这种精确刻蚀的方法可促进汽车、电脑及其外设、通信、工业设备和航天及军用设备的微型化、自动化、绿色化、信息化水平。

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