可控环境的有机柔性光电器件大面积制备与性能测试模块化集成设备系统

The process of organic thin-film photo-electronic devices is simple, low cost, and can be compatible with the flexible substrates, and the room temperature processing and a large area and mass production potential is expected to be widely used in various of applications. However, their instable properties for the organic devices and the lack of suitable processing techniques for preparation of larger area integration of organic photo-electronic devices make the feasibility of a vast of application problematic. Based on the instrument research project of the “Equipment system for an integration of multi-functional modules for preparation and characterization of larger-area organic optoelectronic devices under a controllable environment”, the key technical problems, we propose here a set of design principles of innovative technique solutions, such as the “roller” coating concept: by utilizing a flexible substrate sticking to the cylindrical roller which moves back and forth and meantime rotates along its axis to carry out the thin film deposition in a very large area. The “roller” deposition unit, the glove box and the low-temperature probe station can be combined together by using a transfer chamber unit to keep interconnection in a controllable environment equipment system. Our proposed concept equipment system may provide a novel experimental apparatus and integration techniques for the preparation of large area organic optoelectronics.

有机薄膜光电器件制备工艺简单、成本低廉、可与柔性衬底兼容以及可低温处理和具备大面积批量生产能力，有望在新一代光电器件领域中得到广泛应用。然而，有机光电器件广泛实际应用仍面临着众多挑战。其中器件稳定性问题和缺乏明确的大面积加工及集成方案是制约目前有机薄膜器件实用化规模发展的二个重要瓶颈。本仪器基础研究项目围绕“环境可控条件下进行柔性电路大面积制备和器件加工与测试多模块一体化”的技术方案——这一人们普遍关注的关键技术难题，利用紧凑的腔室互连设计，在一套环境可控的多功能设备中将我们原理创新的“滚筒”真空镀膜技术应用于大面积有机薄膜制备技术；并将器件制备与加工技术和气氛可控的原位光、电表征技术进行集成，用以满足实验室条件下高水平大面积柔性电路研发和器件物理基础研究的设备需求。该集成装置将为实验室研究有机器件性能不稳定性来源和实现大面积有机电路制备工艺和集成方案研究提供一种全新的实验装置和设备系统。

有机分子薄膜光电器件可以根据特定功能需要按照分子设计原则进行构建，而且具有制备工艺简单、成本低廉、可与柔性衬底兼容等特点，有望在下一代光电功能器件中获得广泛应用。为克服有机分子薄膜器件应用过程中面临的器件稳定性和真空蒸镀薄膜大面积加工及集成方案缺乏这两个关键基本问题，本仪器基础研究项目以“环境可控条件下有机分子柔性薄膜大面积制备、器件加工与性能测试多模块一体化”设备技术方案为目标，利用多腔室紧凑互连设计，实现了一套环境可控条件下柔性电路大面积制备和器件加工与测试多模块一体化的集成系统。设备除了应用于大面积有机分子薄膜制备技术，还将器件制备与加工技术和气氛可控的原位光、电表征技术进行集成，基本满足了实验室条件下高水平大面积柔性电路研发和器件物理基础研究的设备需求。利用该集成系统我们开展了一系列实验基础研究，在高性能场效应晶体管、气体传感、有机太阳能电池等领域取得了一些重要的研究成果。该集成装置的成功研制为明确大面积有机分子电路制备工艺和集成方案提供了重要的借鉴和参考。

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