大口径空间望远镜超光滑镜面的多束流团簇离子束平滑技术及工艺研究

The manufacture of space mirrors is one of the key technologies in the development of space astronomical telescope. According to the requirements of China Space Station space telescope Telescope, CSST，which is National major scientific and technological infrastructure， the surface roughness of large aspheric mirror is Ra ≤1nm. Because of the traditional ion beam figuring was not good for optical surface roughness enhancements, the project put forward by gas cluster ion beam smoothing technology, in which the medium was upgrade to cluster state ion aggregates.it will cluster state particle in atomic physics transverse sputtering unique properties applied to space aspheric optical surface and ultra smoothing. The multi beam gas cluster ion beam method was used to improve smoothing efficiency. The project intends to carry out the gas generation, multi beam gas cluster cluster aggregates aggregates and optical surface interaction mechanism, space technology, space optical materials of reflector cluster ion beam smoothing model and technology of super smooth, revealing the characteristics of the cluster ion beam on the optical surface interaction, the establishment of gas cluster ion beam smoothing theoretical model of space optical surface, guide the optimization process, and strive to achieve a breakthrough from two aspects of science and technology issues for the space telescope, ultra smooth surface for the manufacturing of the theory and technology foundation.

空间反射镜制造是空间天文望远镜光学系统研制的核心技术之一。针对国家重大科技基础设施“空间站巡天望远镜（China Space Station Telescope，CSST）”对大口径空间反射镜表面粗糙度的技术需求，项目拟开展空间反射镜超光滑表面制造技术与工艺研究。针对传统离子束修形技术对光学表面粗糙度提升能力不足的缺点，项目提出采用气体团簇离子束技术实现空间光学镜面超光滑制造，作用介质升级为团簇态离子聚集体，将团簇态粒子在原子物理横向溅射的独特性质应用于光学表面的超光滑制造，并提出多束流气体团簇离子束方法以提升平滑效率。项目拟开展多束流气体团簇聚集体的生成、气体团簇聚集体与光学表面相互作用机制、空间反射镜团簇离子束平滑模型及工艺等研究，力争从科学问题和工艺技术两个层面取得突破，实现表面粗糙度Ra≤0.5nm空间反射镜镜面的超光滑制造，为空间天文望远镜的超光滑表面制造奠定理论和技术基础。

空间天文光学系统采用超光滑表面反射镜，可增大成像过程的信噪比，提高成像质量，已成为发展趋势之一。针对空间反射镜超光滑表面制造需求，项目提出气体团簇离子束技术实现空间光学镜面超光滑制造，将团簇态粒子在原子物理横向溅射的独特性质应用于光学表面的超光滑工艺。项目开展了气体团簇聚集体的生成、气体团簇聚集体与光学表面相互作用机制、空间反射镜团簇离子束平滑模型及工艺等研究，突破了空间反射镜气体团簇离子束超光滑制造的机理、工艺、设备等关键技术，完成了多功能光学设施中次镜反射镜组件的超光滑制造，表面粗糙度RMS=0.46nm，满足多功能光学设施对反射镜组件的技术要求。本项目的研究为发展先进空间天文光学系统提供了有力的技术支撑。

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