机械形态性能激光分光瞳差动共焦布里渊—拉曼光谱测量原理与传感系统

In high-end manufacturing such as femtosecond laser machining, ion etching and electron beam machining, the real-time chromatography measurement with high resolution for the configuration and performance parameters of the material micro-region is urgent to be researched, which has important science significance and application prospect for reflecting the evolvement process of physical property, chemical property, scale effect and interface effect in machining process. To achieve the scale-span and high resolution chromatography measurement of configuration and performance parameters of the material micro-region, laser differential confocal Brillouin-Raman spectra measurement principle and sensing technique is researched in the project, which simultaneously detects the geometrical structures, Brillouin spectra and Raman spectra from micro-region, then deals with the signals with integration, decoupling and spectrum Separation, and achieve high resolution chromatography measurement of multi performance parameters including geometrical structure, composition, stress, elasticity and density. The research works include the physical base of light scattering for configuration and performance parameter measurement, laser differential confocal Brillouin-Raman spectra measurement principle, the focusing properties of a radially polarized beam for excitation facula compression, sensing system establishment and measurement principle verification, and decoupling and characterization of multi-performance parameters, and so on. The technique specifications are axial resolution of ≤2nm, lateral resolution of ≤0.1micrometer, Brillouin spectrum resolution of ≤0.5GHz and Raman spectrum of ≤1 wave number.

在飞秒激光加工、离子束刻蚀、电子束加工等高端制造中材料微区“形态”和“性能”参数的高分辨、实时、层析测量是目前亟待研究的重大测试问题，其对于揭示和反映制造过程中物理性质、化学性质、尺度效应和界面效应的演变过程具有重要的科学意义和应用前景。本项目针对微区形态性能参数的跨尺度、高分辨、层析测量问题，提出研究激光分光瞳差动共焦布里渊—拉曼光谱测量原理及传感技术，其通过同时探测微区几何结构、布里渊光谱和拉曼光谱信息，再经测得信息的融合、解谱、解耦等处理，达到微区几何参数、成分、应力、弹性、密度等多性能参数的高分辨层析测量。研究包括：形态性能参数测量光散射物理基础、激光分光瞳差动共焦布里渊—拉曼光谱测量新原理、径向偏振光紧聚焦光斑压缩方法、传感系统构建与原理验证、多性能参数解谱、解耦与表征等。指标：轴向分辨力≤2nm，横向分辨力≤0.1微米，布里渊光谱分辨力≤0.5GHz，拉曼光谱分辨力≤1波数等。

布里渊光谱、拉曼光谱显微成像技术可以实现样品微区形态参数和性能参数的无损探测，已广泛应用于生物医学检测、材料科学、物理化学等领域中。针对飞秒激光加工等高端制造中材料微区形态、性能参数的高分辨实时层析测量需求，本项目提出了分光瞳激光差动共焦布里渊—拉曼光谱测量新原理及其传感技术，取得的具体研究成果包括：.1）提出了分光瞳激光差动共焦布里渊-拉曼光谱探测方法，该方法将分光瞳激光差动共焦显微成像技术与共焦布里渊光谱探测技术有机融合，实现了微区几何参数、布里渊光谱和拉曼光谱测量的高空间分辨能力、高识别能力和高层析成像能力的同时探测，为跨尺度微细结构形态性能参数的高分辨测量提供有效技术手段。.2）开展了激光共焦分辨力改善方法的研究，提出了高空间分辨的分光瞳横向差动共焦显微成像方法，有效提升了形态参数测量的空间分辨力及轴向定焦能力；提出了一种基于超分辨图像复原技术的分光瞳激光差动共焦布里渊光谱成像方法，改善了布里渊光谱图像及三维形貌图像的空间分辨力，实现高空间分辨布里渊图谱成像。.3）构建了高空间分辨分光瞳激光差动共焦布里渊-拉曼成像系统，开展了相关实验分析研究，实现了细结构形态性能参数同时探测的“图谱合一”成像。构建的分光瞳激光差动共焦布里渊-拉曼光谱测量系统轴向分辨力优于1.5nm，横向分辨力优于100nm；拉曼光谱分辨力优于1cm-1，布里渊光谱分辨力优于0.5GHz，光谱空间分辨力优于0.5μm；实现了直角坐标范围100mm×100mm、轴向范围10mm以上的大范围测量；由测得的微区几何参数、布里渊散射光谱信息和拉曼散射光谱信息可以解算出微区形态性能参数。.围绕研究内容发表论文33篇，其中SCI论文21篇，在Photonics Research、Applied Surface Science、Optics Express、Optics Letters 期刊发表6篇，申请或授权发明专利12项。培养博士研究生5名，硕士研究生7名。

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