Smart nanostructured optical coatings prepared by pulsed plasma-based techniques

采用脉冲等离子体技术制备的智能纳米结构光学涂层

• 批准号: RGPIN-2020-06937
• 负责人: Martinu, Ludvik
• 金额: $ 3.64万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=718567
• 关键词: Smart; nanostructured; optical; coatings; prepared

The field of coating and surface engineering technology is evolving very rapidly thanks to the synergy between the progress in materials science, development of new fabrication processes and ever increasing technical, environmental and economic challenges. Moreover, the range of applications of OCs continues to broaden, offering attractive opportunities in areas such as telecommunications, displays, energy saving, sensing and environmental control, lasers, lighting, instrumentation, consumer electronics, health-related devices, document security and numerous others. The strive to develop new materials with complex nanostructures on 2D/3D levels has resulted in the discovery of new optical effects that could find use in multiple applications such as smart (active) optical coating (SOC) systems and functional metasurfaces (FMS) with tailored electrochromic, thermochromic, plasmonic, selective catalytic and other properties suitable for their implementation in smart multifunctional optical filters (SOFs). In response to the challenges in the area of OC described above, the proposed program will advance cutting edge research on the growth of thin films and modification of surfaces using low pressure, pulse-managed plasma processes (PMPP) to fabricate structurally controlled SOCs and FMS with tailored properties, suitable for their use in SOFs. Specifically, it will focus on the following aspects: a) Using the PMPP, such as high power impulse magnetron sputtering (HiPIMS), we plan to explore film growth in tandem with plasma enhanced chemical vapor deposition (PECVD), Plasma Enhanced Atomic Layer Deposition (PE-ALD) and Glancing Angle Deposition (GLAD) for their potential synergistic effects. Main interest will be devoted to the new possibilities offered by controlled pulse modulation of the discharge parameters and of the plasma-surface interactions to synthesize active and passive materials in the form of homogeneous films with controlled density, nanostructure, crystallinity and porosity, as well as optical nanostructures comprising well defined surface patterns, and nanoparticles obtained by gas phase aggregation. b) Integration of the nanostructured smart OC within complete multilayer SOFs will be performed with the aim to demonstrate device functions suitable for applications in the areas of energy control and saving (smart windows and smart radiators), security (anticounterfeiting and authentication), gas and vapor sensors, and others. The program is based on the holistic approach to functional coatings and surface engineering, that includes all necessary steps to close the logistic loop involving four essential components, namely (i) optical coating design, (ii) process development including diagnostics and monitoring, (iii) materials synthesis, and (iv) materials and device characterization and functional testing.

由于材料科学的进步，新制造过程的发展以及不断增加的技术，环境和经济挑战之间的协同作用，涂料和表面工程技术领域的发展迅速。此外，OC的应用范围继续扩大，在电信，显示，节能，节能，感应和环境控制，激光器，照明，仪器，消费电子，消费电子，与健康相关的设备，文档安全和许多其他领域提供了有吸引力的机会。 The strive to develop new materials with complex nanostructures on 2D/3D levels has resulted in the discovery of new optical effects that could find use in multiple applications such as smart (active) optical coating (SOC) systems and functional metasurfaces (FMS) with tailored electrochromic, thermochromic, plasmonic, selective catalytic and other properties suitable for their implementation in smart multifunctional optical filters (SOFs). 为了应对上述OC领域的挑战，该计划将使用低压，脉搏管理的等离子体过程（PMPP）来促进对薄膜生长的最前沿研究，以制造具有量身定制特性的结构控制的SOC和FMS，适用于其在SOF中的使用。具体而言，它将重点放在以下方面： a）使用PMPP，例如高功率脉冲磁铁溅射（HIPIMS），我们计划探索与血浆增强的化学蒸气沉积（PECVD）串联膜增长，等离子体增强原子层沉积（PE-ald）和GLANCANE SEGRIST（GLAD）的潜在效果。 Main interest will be devoted to the new possibilities offered by controlled pulse modulation of the discharge parameters and of the plasma-surface interactions to synthesize active and passive materials in the form of homogeneous films with controlled density, nanostructure, crystallinity and porosity, as well as optical nanostructures comprising well defined surface patterns, and nanoparticles obtained by gas phase aggregation. b）将在完整的多层SOF中集成纳米结构的智能OC，目的是展示适用于能源控制和节省领域应用程序（智能窗口和智能散热器），安全性（防空和身份验证），天然气和蒸气传感器等的设备功能。 该程序基于功能涂层和表面工程的整体方法，其中包括关闭涉及四个必需组件的逻辑循环的所有必要步骤，即（i）光涂层设计，（ii）过程开发，包括诊断和监测，（iii）材料合成，（iii）材料合成，（iv）材料和设备表征和功能测试。