Scanning vibrometer for 3D MEMS dynamic characterization

用于 3D MEMS 动态表征的扫描振动计

• 批准号: 391152-2010
• 负责人: Moussa, Walied
• 金额: $ 10.16万
• 依托单位: University of Alberta
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2009
• 资助国家: 加拿大
• 起止时间: 2009-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=443382
• 关键词: Scanning; vibrometer; 3D; MEMS; dynamic

This proposal request funding for purchasing of Laser Doppler Vibrometry (LDV) system that has the capability of characterizing the 3D Micro/NANO Electro Mechanical Systems (MEMS/NEMS) dynamics at high frequency. Several research projects in our group and the University of Alberta will utilize the requested equipments including, dynamic characterization of energy harvesting MEMS/NEMS based devices using ambient vibrations surrounding an aging biomedical, and mechanical, aerospace, civil or environmental system. Our group is involved in a number of other projects that include MEMS/NEMS actuators at high resonance frequency, such as structurally modified Radio Frequency switch toward the reduction of skin effect at high frequency (20 MHz). Laser Doppler Vibrometry is a widely accepted tool for dynamic characterization of MEMS/NEMS. Using automated scan capability, LDV can measure structural resonance and display out-of-plane deflection shapes with amplitudes down to the picometer level and frequencies to 30 MHz. This LDV is presently being used throughout the MEMS/NEMS community to characterize the dynamics of micro-devices such as optical switches, vibrating cantilevers, membranes, actuators, motors, micro-optics and torsional oscillators. Applications for Laser Vibrometry measurements include: (1) Dynamic testing of device response to determine mechanical parameters such as resonant frequency, stiffness and damping, (2) Characterization of device response during design development and release processes, (3) Validate design performance versus expected FEA model predictions, (4) Determine reliability under mechanical excitation (wire bonding, environmental vibration and shock), radiation, temperature, humidity and pressure stress by targeting device inside environmental or vacuum chamber and (5) Calibrate actuator and sensor displacements versus drive voltage over wide range of movements down to nano meter scale.

该提案请求资助购买激光多普勒测振 (LDV) 系统，该系统能够在高频下表征 3D 微/纳米机电系统 (MEMS/NEMS) 动力学。我们小组和阿尔伯塔大学的几个研究项目将利用所需的设备，包括利用老化生物医学、机械、航空航天、民用或环境系统周围的环境振动对基于能量收集 MEMS/NEMS 的设备进行动态表征。我们的团队参与了许多其他项目，包括高谐振频率的 MEMS/NEMS 执行器，例如结构改进的射频开关，以减少高频 (20 MHz) 的集肤效应。激光多普勒测振法​​是广泛接受的 MEMS/NEMS 动态表征工具。利用自动扫描功能，LDV 可以测量结构共振并显示面外偏转形状，幅度低至皮米级，频率低至 30 MHz。该 LDV 目前在整个 MEMS/NEMS 社区中使用，用于表征微型设备的动力学特性，例如光开关、振动悬臂梁、薄膜、执行器、电机、微光学器件和扭转振荡器。激光测振测量的应用包括：(1) 设备响应的动态测试，以确定谐振频率、刚度和阻尼等机械参数，(2) 设计开发和发布过程中设备响应的表征，(3) 验证设计性能与预期的比较FEA 模型预测，(4) 通过瞄准环境或真空室内的设备来确定机械激励（引线键合、环境振动和冲击）、辐射、温度、湿度和压力应力下的可靠性，以及 (5) 校准执行器和传感器位移与驱动电压范围广泛的运动小至纳米级。