Electronic characterization of composite materials for MEMS and nanoscale integration

用于 MEMS 和纳米级集成的复合材料的电子表征

• 批准号: 249677-2007
• 负责人: Oliver, Derek
• 金额: $ 1.25万
• 依托单位: University of Manitoba
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2007
• 资助国家: 加拿大
• 起止时间: 2007-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=364056
• 关键词: Electronic; characterization; composite; materials; MEMS

Recent advances in microelectronic systems and devices have been driven by the integration of systems and functionality that cannot be directly provided by conventional microelectronics. One example of this is the functionality provided by a micro-electro-mechanical system (MEMS) that can be used as a resonant structure for low-power frequency referencing and/or filtering in a signal processing system. Developments of this nature rely heavily on understanding material properties separately and in combinations not found in nature - i.e. treating a composite material as a novel or 'artificial' material.   This proposal will develop an emerging scanning probe microscopy technique (SPM) that can characterize the dynamic mechanical response of MEM structures and image the dynamic polarization response of materials. This will include the design and testing of an active photonic material - a switchable device that can reject microwave and millimeter wave signals in a well-defined "stopband" range when activated. Development of theory for the photonic devices will be supported by stroboscopic SPM experiments that can image the effects of radio-frequency surface acoustic waves. While further developing our understanding of the dynamics of artificial materials, these studies will contribute to enhanced testing of MEM structures, non-mechanical optical switches and new approaches to designing surface acoustic wave filters.   In addition, emerging themes in the study of directed fabrication using dielectrophoresis will explore the electrical character of molecular electronic contacts as they form - and link to collaborative studies in electrophysiology of acute neural slices where new electrode materials and system-on-chip electrode designs will help strengthen this important biomedical field.   The interdisciplinary and collaborative nature of this research will provide an exciting and rewarding environment for students to develop their skills while working on projects of practical and scientific importance.

微电子系统和设备的最新进展是由系统和功能的集成所驱动的，该系统和功能无法直接由常规的微电子学提供。一个例子是微机械系统（MEMS）提供的功能，可以用作信号处理系统中低功率频率参考和/或过滤的共振结构。这种性质的发展在很大程度上依赖于分别理解材料特性和在自然界中找不到的组合 - 即将复合材料视为一种新颖或“人造”材料。该建议将开发出新的扫描探针显微镜技术（SPM），该技术可以表征MEM结构的动态机械响应并为材料的动态极化响应形象。这将包括活性光子材料的设计和测试 - 一种可切换的设备，可以拒绝微波和毫米波信号在明确定义的“停止频带”范围内为光子设备的理论开发，将由频道镜面SPM实验支持，该实验可以图像无线电表面表面声波的效果形象成像。在进一步发展我们对人造材料动力学的理解的同时，这些研究将有助于增强对MEM结构，非机械光学开关以及设计表面声波过滤器的新方法的测试。此外，在使用模子生成的定向制造研究中，新兴的主题将探索分子电子接触形成时的电气特征 - 并与急性神经科学电生理学的协作研究联系起来，其中新的电极材料和新电极材料和系统对芯片电极设计的设计将有助于增强这一重要的生物医学领域。这项研究的跨学科和协作性质将为学生提供一个令人兴奋和有意义的环境，以在实践和科学重要性的项目中发展自己的技能。