Micromachined Single Crystals for HF Transducers

用于高频传感器的微机械单晶

• 批准号: 6689782
• 负责人: Wesley S. Hackenberger
• 金额: $ 10万
• 依托单位: TRS TECHNOLOGIES, INC.
• 依托单位国家: 美国
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-01 至 2004-06-15
• 项目状态: 已结题
• 来源: https://reporter.nih.gov/project-details/6689782
• 关键词: bioimaging /biomedical imaging; biomedical equipment development; electrical property; image enhancement; miniature biomedical equipment; ultrasound

DESCRIPTION (provided by applicant): High frequency ultrasound is needed for high resolution imaging applications in dermatology, ophthalmology, intravascular imaging, and laproscopy. The purpose of the proposed effort will be to develop a novel lithography-based micromachining method for single crystal piezoelectrics in order to fabricate 2-2 and 1-3 composite transducers capable of operating at frequencies from 20 MHz to greater than 50 MHz. Single crystal piezoelectrics have considerably higher piezoelectric coefficients and electromechanical coupling factors than PZT ceramics, and as a result they are being used to fabricate ultrasound transducers with unprecedented bandwidth and sensitivity. Application of single crystal piezoelectrics to high frequency transducers is expected to result in devices with much larger depths of field, limits on which are a significant draw back for existing high frequency transducers. In addition use of single cyrstals, as opposed to ceramic, allows fabrication by lithography based micromachining methods. Thus, very fine featured crystal-polymer composite transducers can be easily fabricated at reasonable cost. In this program both wet etching and reactive ion etching will be investigated as methods for micromaching 2-2 and 1-3 crystal-polymer composite structures for ultrasound transducers. The resulting transducers are expected to have bandwidths in excess of 100% with sensitivities even better than current ceramic transducers operated below 20 MHz. This would be an unprecedented advance for high frequency ultrasound imaging and would lead to greatly improved diagnostic capability in applications ranging form early stage glaucoma detection to biopsy or melanoma tumor histology.

描述（由申请人提供）： 高分辨率超声是皮肤病学，眼科，血管内成像和腹腔镜检查中的高分辨率成像应用所需的。提出的努力的目的是开发一种基于光刻的微机械方法，以制造单晶压电，以制造能够在20 MHz到大于50 MHz的频率下运行的2-2和1-3复合传感器。与PZT陶瓷相比，单晶压电电极具有更高的压电系数和机电耦合因子，因此它们被用于制造具有前所未有的绷带和敏感性的超声传感器。将单晶压电器应用于高频传感器，预计将导致具有较大磁场深度的设备，这对于现有的高频传感器来说是一个重要的限制。此外，与陶瓷相比，使用单个环境，可以通过基于光刻的微加工方法制造。因此，非常出色的特征晶体聚合物复合胶合剂可以以合理的成本轻松制造。在该程序中，将研究湿蚀刻和反应性离子蚀刻，作为微压2-2和1-3晶体聚合物复合结构的超声传感器的方法。预计所得传感器的带宽超过100％，灵敏度甚至比目前的陶瓷传感器更好，而陶瓷传感器的运行量低于20 MHz。对于高频超声成像，这将是前所未有的进步，并将大大提高应用形式的早期青光眼检测到活检或黑色素瘤肿瘤组织学的诊断能力。