Resonance enhanced CMOS sensors for high-throughput sensing

用于高通量传感的共振增强型 CMOS 传感器

• 批准号: 10683085
• 负责人: Lan Yang
• 金额: $ 11.71万
• 依托单位: WASHINGTON UNIVERSITY
• 依托单位国家: 美国
• 财政年份: 2021
• 资助国家: 美国
• 起止时间: 2021-07-15 至 2024-05-31
• 项目状态: 已结题
• 来源: https://reporter.nih.gov/project-details/10683085
• 关键词: Achievement; Address; Adopted; Algorithms; Biochemical; Biological Markers; Biomedical Research; Biosensing Techniques; Biosensor; Communication; Coupled; Detection; Development; Disease; Electronics; Enzyme-Linked Immunosorbent Assay; Eukaryotic Cell; Food Safety; Foundations; Individual; Industry; Label; Light; Measures; Medical; Medical Research; Medicine; Methods; Optics; Pharmacologic Substance; Photons; Play; Proteins; Public Health; Pump; Raman Spectrum Analysis; Refractive Indices; Research; Resolution; Role; Security; Semiconductors; Signal Transduction; Silicon Dioxide; Spectrum Analysis; Structure; Surface; System; Techniques; Technology; Testing; Time; United States National Institutes of Health; Work; clinical application; clinical diagnosis; clinical diagnostics; cost; design; detection platform; detection sensitivity; diagnostic tool; disease diagnosis; improved; innovation; light intensity; metal oxide; microsensor; microsystems; nanophotonic; novel; photonics; protein protein interaction; reconstruction; residence; sensor; sensor technology; single molecule; tool; waveguide

PROJECT SUMMARY/ABSTRACT Microsystems for the detection of biomolecules can play important roles in biomedical research, clinical diagnosis, food safety, homeland security and pharmaceutical testing. The research objective of this proposal is to develop an ultrasensitive and high-throughput complementary metal–oxide– semiconductor (CMOS) sensors including over 10,000 sensor units on a 1-inch chip that could provided high-resolution spectroscopic information with combined features of label-free, high sensitivity, high throughput, small size, and easy integration with existing electronics. Each sensor unit is composed for surface-functionalized silica-based high-quality whispering-gallery-mode (WGM) resonators that approximate the size of eukaryotic cells for ultra-sensitive label-free biosensing of specific proteins, biomarkers and protein-protein interactions. The basis for the technology is the physical associations and interactions of biomolecules on a microresonator surface alter the residence time of photons in a way that can be measured and quantified by a novel photonic crystal (PC) integrated CMOS spectrometer. Moreover, the proposed PC-CMOS is expected to achieve a video-frame rate of spectroscopy with a large field of view (FOV) (2 cm × 2 cm) and high spectral resolution (1 pm). The unique features of the proposed sensor lie in two advantages: (1) ultrasensitivity enabled by significantly enhanced light-matter interactions in high-quality WGM optical microresonators; and (2) high-throughput sensing mechanisms adopted from CMOS originally developed in the semiconductor industry for communications and electronic products. Our objective will be achieved by completing the following three specific aims. Aim 1 will develop PC slab spectrometer on a CMOS chip for wide-field high-resolution spectroscopy. Aim 2 will design, fabricate, measure, and optimize the surface-grating-waveguide-coupled WGM microsensor arrays. Aim 3 will demonstrate resonance-enhanced high-resolution CMOS spectrometer. The proposed research contains three main innovations: (1) the novel WGM sensor arrays are expected to offer several orders of magnitude higher sensitivity than existing sensing technologies, such as ELISA; (2) PC slab spectrometer on a CMOS chip, which enables a single-shot detection of over 10,000 optical mode spectra of the WGM microsensors and resonance-enhanced Raman spectroscopy; (3) integrating ultrasensitive WGM sensors with CMOS technologies to realize a new system leading to a disruptive technology for sensing applications where high sensitivity and high throughput are desired. This project is significant because successful completion of this work will lay the foundation for the development of a new biosensor with great potential to advance clinical diagnosis and biomedical research by revolutionizing conventional sensing technologies by leveraging the existing technologies in semiconductor industries. If successful, the technology developed in this project will be able to serve as a powerful tool for NIH R01 projects targeting for an in-depth understanding of specific diseases or medical problems.

项目摘要/摘要 用于检测生物分子的微系统可以在生物医学研究中起重要作用 诊断，食品安全，国土安全和药物测试。研究目标 建议是开发超敏感和高通量的完整金属 - 氧化物 - 半导体（CMOS）传感器，包括1英寸芯片上的10,000多个传感器单元 提供高分辨率的光谱信息，具有无标签，高的合并特征 灵敏度，高吞吐量，小尺寸以及与现有电子设备易于集成。每个传感器单元 由表面官能化的基于二氧化硅的高质量窃窃私语模式（WGM）谐振器组成 近似于特定蛋白的超敏感性无标记的真核细胞的大小， 生物标志物和蛋白质 - 蛋白质相互作用。技术的基础是物理关联和 生物分子在微孔子表面上的相互作用以某种方式改变照片的停留时间 可以通过新型光子晶体（PC）集成的CMOS光谱仪进行测量和量化。而且， 建议的PC-CMO有望实现具有较大视野（FOV）的视频框架速率 （2 cm×2 cm）和高光谱分辨率（1 pm）。拟议的传感器的独特功能在两个 优点：（1）高质量WGM中显着增强的光 - 物质相互作用来实现超敏性 光学微孔子； （2）最初采用的CMO采用的高通量感应机制 在半导体行业开发用于通信和电子产品。我们的目标将是 AIM 1将在CMO上开发PC平板光谱仪 芯片用于广阔的高分辨率光谱。 AIM 2将设计，制造，测量和优化 表面栅形波基耦合的WGM微传感器阵列。 AIM 3将展示共振增强 高分辨率CMOS光谱仪。拟议的研究包含三个主要创新：（1） 新型WGM传感器阵列有望比现有的数量级高几个数量级 传感技术，例如ELISA； （2）CMOS芯片上的PC平板光谱仪，该芯片可实现单一 检测WGM微传感器和共振增强的拉曼的10,000多个光学模式光谱 光谱； （3）将超敏感的WGM传感器与CMOS技术集成到实现新系统 导致高灵敏度和高吞吐量的传感应用技术的破坏性技术 需要。该项目很重要，因为这项工作的成功完成将为 开发具有巨大潜力来推进临床诊断和生物医学研究的新生物传感器的开发 通过利用半导体的现有技术来彻底改变常规传感技术 行业。如果成功，该项目中开发的技术将能够作为NIH的强大工具 R01项目针对对特定疾病或医疗问题的深入了解。