3D Nanofabrication and Nanocharacterisation facility

3D 纳米加工和纳米表征设施

• 批准号: LE200100003
• 负责人: Prof Igor Aharonovich
• 金额: $ 26.67万
• 依托单位: University of Technology Sydney
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Infrastructure, Equipment and Facilities
• 财政年份: 2020
• 资助国家: 澳大利亚
• 起止时间: 2020-01-01 至 2020-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LE200100003
• 关键词: 3D; Nanofabrication; Nanocharacterisation; facility

This project aims to establish a revolutionary nanoscale fabrication and characterisation facility in Australia. The facility is an angle-based nanoscale etching system with integrated chemical analysis capabilities and will be the first instrument of its kind in Australia. The facility will enable unprecedented fabrication and characterisation of 3D nanostructures and new device geometries from semiconductors, oxides and metals that underpin modern nanoelectronics for innovative energy, nano-optical and quantum device applications. This unique equipment will facilitate breakthrough discoveries in nanomaterials, and foster collaborations amongst Australian researchers to accelerate industry in advanced nanodevice technologies.

该项目旨在在澳大利亚建立革命性的纳米级制造和表征设施。该设施是一种基于角度的纳米级蚀刻系统，具有集成的化学分析能力，将是澳大利亚同类工具。该设施将实现前所未有的制造和表征3D纳米结构和新设备的几何形状，这些几何形状是从半导体，氧化物和金属中进行的，这些几何形状是现代纳米纳米电子，用于创新能量，纳米光和量子设备的应用。这种独特的设备将有助于纳米材料中的突破性发现，并促进澳大利亚研究人员在高级纳米式技术技术中加速行业的合作。