Piezoelectric thick film more than 100 miro-meters deposited by the ultrasonic assisted hydrothermal method

超声辅助水热法沉积100微米以上压电厚膜

• 批准号: 23360134
• 负责人: MORITA Takeshi
• 金额: $ 11.56万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360134/
• 关键词: 厚膜; 強誘電・圧電薄膜合成技術; 強誘電・圧電薄膜; 水熱合成法

For medical ultrasonic devices and micro piezoelectric actuators, thick piezoelectric films are strongly demanded. In the conventional piezoelectric film deposition processes, the thickness have been limited because the crack was easily made inside the film due to high temperature crystallization process more than 600 degree C.In this study, we focused on the hydrothermal method whose reaction temperature is 250 degree C. By developing the ultrasonic assisted hydrothermal method, we demonstrated a 172 micrometer thickness of potassium niobate film.

对于医疗超声设备和微电干执行器，强烈要求厚的压电膜。在常规的压电膜沉积过程中，厚度受到限制，因为由于高温结晶过程在胶片内很容易制成，因此裂纹超过600度。在这项研究中，我们的反应温度为250度C。通过开发超声辅助的水热方法，我们的反应温度为250度。

项目成果

Hydrothermal method for piezoelectric materials and their applications

水热法压电材料及其应用

• 发表时间: 2013
• 作者: Takeshi Morita

The Study on PZT film Deposited by Ultrasonic Assisted Hydrothermal Method and its Effect of Ultrasonic Irradiation

超声辅助水热法沉积PZT薄膜及其超声辐照效果的研究

• 发表时间: 2012
• 作者: Yu Wang;Yuhei Hayamizu;Hidefumi Akiyama;Kanako Ohta
• 通讯作者: Kanako Ohta

Self-sensing ultrasound transducer for cavitation monitoring

用于空化监测的自感应超声换能器

• 发表时间: 2013
• 作者: Peter Bornmann;Takafumi Maeda;Tobias Hemsel;Takeshi Morita;Walter Sextro
• 通讯作者: Walter Sextro

Synthesis of piezoelectric materials by ultrasonic hydrothermal method

超声水热法合成压电材料

• 发表时间: 2011
• 作者: Gaku ISOBE;Ryo AGEBA;Takafumi MAEDA;Peter BORNMANN;Tobias HEMSEL;Takeshi MORITA
• 通讯作者: Takeshi MORITA

(K_0.48Na_0.52)NbO_3 ceramics using powders synthesized by ultrasonic assisted hydrothermal method

超声波辅助水热法合成粉体(K_0.48Na_0.52)NbO_3陶瓷

• 发表时间: 2012
• 作者: Gaku Isobe;Takufumi Maeda;Kanako Ohta;Yuriko Yokouchi;Peter Bornmann;Tobias Hemsel and Takeshi Morita
• 通讯作者: Tobias Hemsel and Takeshi Morita