DLC Coating on a Micro/Nano-Trench by Bipolar PBII&D and Analysis of Plasma Behavior

双极 PBII 微/纳米沟槽上的 DLC 涂层

• 批准号: 23360072
• 负责人: CHOI Junho
• 金额: $ 11.98万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360072/
• 关键词: DLC膜; バイポーラＰＢＩＩ; 3次元コーティング; プラズマシミュレーション; ラマン分光分析; バイポーラPBII; PIC-MCC; マイクロトレンチ; PBII; 3次元成膜; PIC-MCCM; トレンチパターン; プラズマイオン注入法; ナノコーティング; プラズマ; ナノインプリント

Diamond-like carbon (DLC) coating was deposited on a micro/nano-trench by bipolar PBII, and the structure of the DLC film across the overall surface region of the trench was examined by making use of their corresponding Raman spectra. The plasma behavior in surrounding of the trench was calculated with Particle-In-Cell Monte Carlo Collision Method. As a result, DLC film was successfully coated on the overall surface of the trench. When the applied negative voltage was -0.5 kV, the structure of DLC film on the trench-sidewall became more polymer-like carbon than those of the top and bottom surfaces did. This is because the ions, which strike the sidewall, tend to have less incident energy. Whereas in the case of -15 kV, the DLC film on the sidewall was more graphite-like, despite of its smaller incident ion energy in comparison to those of the top and bottom surfaces. This is attributed to sputtering effect from the bottom surface of the trench, as evidenced by the plasma simulation.

通过双极 PBII 在微/纳米沟槽上沉积类金刚石碳 (DLC) 涂层，并利用相应的拉曼光谱检查整个沟槽表面区域的 DLC 薄膜的结构。采用粒子内蒙特卡罗碰撞法计算了沟槽周围的等离子体行为。结果，DLC薄膜成功地涂覆在沟槽的整个表面上。当施加的负电压为-0.5 kV时，沟槽侧壁上的DLC膜结构比顶面和底面的DLC膜结构变得更像聚合物碳。这是因为撞击侧壁的离子往往具有较小的入射能量。而在-15 kV的情况下，侧壁上的DLC膜更像石墨，尽管其入射离子能量比顶面和底面的要小。正如等离子体模拟所证明的那样，这归因于沟槽底部表面的溅射效应。

项目成果

プラズマイオン注入を用いたカーボンオニオンの合成

使用等离子体离子注入合成碳洋葱

• 发表时间: 2011
• 作者: 松本直浩;崔俊豪;加藤孝久
• 通讯作者: 加藤孝久

ラマンスペクトルを用いたDLC膜の構造および機械的特性評価

使用拉曼光谱评估 DLC 薄膜的结构和机械性能

• 发表时间: 2012
• 作者: Haibo Wang;Joon-wan Kim;Shinichi Yokota;Kazuya Edamura;TARO NAKAMURA,YUICHIRO MIDORIKAWA and HIROKI TOMORI;日比貴之,崔〓豪,加藤孝久,川口雅弘
• 通讯作者: 日比貴之,崔〓豪,加藤孝久,川口雅弘

ナノスケールシリコンモールドへのDLC保護膜の形成

纳米级硅模具上DLC保护膜的形成

• 发表时间: 2012
• 作者: 崔埈豪;中原優也;長藤圭介;朴元淳;加藤孝久
• 通讯作者: 加藤孝久

Low temperature Si-DLC coatings on fluoro rubber by a bipolar pulse type PBII system

• DOI: 10.1016/j.surfcoat.2011.04.011
• 发表时间: 2011-11-25
• 期刊: SURFACE & COATINGS TECHNOLOGY
• 影响因子: 5.4
• 作者: Masami, Ikeyama;Haruho, Masuda;Junho, Choi
• 通讯作者: Junho, Choi

マイクロ・ナノスケール３次元DLCコーティング

微/纳米级3D DLC涂层

• 发表时间: 2013
• 期刊: 月刊トライボロジー
• 作者: S. Yarimitsu;K. Nakashima;Y. Sawae;T. Murakami;Toru Fujii;崔 埈豪
• 通讯作者: 崔 埈豪