Development of Lead-Free Biocompatible Multi-Layer Thin-film Structure Generation Technology for Implantable Actuator and Energy Harvest Device

用于植入式执行器和能量收集装置的无铅生物相容性多层薄膜结构生成技术的开发

• 批准号: 23360059
• 负责人: NAKAMACHI Eiji
• 金额: $ 12.31万
• 依托单位: Doshisha University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2013
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360059/
• 关键词: 分子材料設計; 創製プロセス最適化; 圧電特性; 生体適合; 第一原理計算; アクチュエータ; 発電デバイス; スパッタ成膜

We developed a lead-free biocompatible multi-layer thin-film structure generation technology for implantable actuator and energy harvest device, as demonstrated below: (1) Piezoelectric stress constants of designed mixed crystals, Ti doped MSO, obtained by the first-principle calculations was 0.696(C/m2), which is 1.52 times larger than MSO. Piezoelectric constant d33 was 354.8pm/V. (2) Optimum post-annealing temperature was obtained as 676 centigrade, its crystallization of tetragonal MgSiO3 was 90.5%.High crystallization of tetragonal MgSiO3 was obtained on generated ten-layered thin film. Its piezoelectric constant d33 was 406.1 pm/V. (3) Mono-morph MSO cantilever actuator could be vibrated with the amplitude tens nm under 15 Voltage. (4) A magnetic induced hybrid vibration energy harvester, which employed the mono-morph MSO and PVDF piezoelectric cantilever, generated 1.2 microW. We confirmed that this device can provide a sufficient power for implantable Bio-MEMS device.

我们开发了一种无铅生物相容性的多层薄膜结构生成技术，用于植入式执行器和能量收集设备，如下所示：（1）设计的混合晶体的压电应力常数，Ti掺杂MSO，由第一原质计算获得的TI掺杂MSO（C/M2）为0.696（C/M2），比MSO大于MSO。压电常数D33为354.8pm/v。 （2）以676厘米的形式获得了最佳的解放后温度，其四方MGSIO3的结晶为90.5％。在产生的十层薄膜上获得了四方MGSIO3的高度结晶。它的压电常数D33为406.1 pm/v。 （3）单孔MSO悬臂执行器可以用低于15电压的振幅NM振动。 （4）磁性诱导的杂化能量收割机，该杂交能量收割机采用了Mono-Morph MSO和PVDF压电悬臂，产生了1.2微光。我们确认该设备可以为可植入的生物MEM设备提供足够的功率。

项目成果

Development of a Micropump for Bio-MEMS Using a New Biocompatible Piezoelectric Material MgSiO_3

使用新型生物相容性压电材料MgSiO_3开发生物MEMS微型泵

• DOI: 10.1117/1.3624515
• 发表时间: 2011
• 期刊: J. Micro/Nanolith. MEMS MOEMS
• 作者: Nakamachi;E.;Hwang;H.;Okamoto;N. and Morita;Y.
• 通讯作者: Y.

Crystallographic Process Optimization of Biocompatible Piezoelectric MgSiO3 Thin Film Generation

生物相容性压电 MgSiO3 薄膜生成的晶体学工艺优化

• 发表时间: 2013
• 作者: K. Takumi;Y. Morita;E. Nakamachi
• 通讯作者: E. Nakamachi

ユニモルフ圧電片持ち梁を用いた磁力誘起型低周波発電システムの開発

采用单压电晶片悬臂梁的磁感应低频发电系统的开发

• 发表时间: 2012
• 作者: 南庸介;森田有亮;仲町英治
• 通讯作者: 仲町英治

Development of Bio-MEMS Device for Cell Cluster Patterning by Using Dielectrophoresis Method

介电泳法细胞簇图案化生物MEMS器件的开发

• 发表时间: 2013
• 作者: S. MURAKAMI,Y. MORITA;and E. NAKAMACHI
• 通讯作者: and E. NAKAMACHI

Hierarchical modeling of multigrain and multidomain structures in piezoelectric materials

压电材料中多晶粒和多域结构的分层建模

• 发表时间: 2012
• 作者: Yasutomo Uetsuji;Hiroyuki Kuramae,Kazuyoshi Tsuchiya;Yasutomo Uetsuji
• 通讯作者: Yasutomo Uetsuji