Dynamic process of ultrashort-pulse laser pumped nanostructure formation in attosecond time scale and its application

阿秒时间尺度超短脉冲激光泵浦纳米结构形成动态过程及其应用

• 批准号: 23360034
• 负责人: MIYAZAKI KENZO
• 金额: $ 13.31万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360034/
• 关键词: フェムト秒レーザー; アブレーション; ナノ周期構造; 表面プラズモン・ポラリトン; 近接場; ナノ格子; アト秒; レーザープロセッシング; ナノ構造; 界面プラズマ; 半導体

We have demonstrated that periodic nanostructure formation on dielectric, semiconductor, and metal surfaces irradiated with femtosecond laser pulses is dominated by the excitation of surface plasmon polaritons (SPPs), through the time-resolved measurements. Modeling the physical process of nanostructuring, we have developed a new ablation technique to control the excitation of spatial SPP wave modes and directly imprint a homogeneous nanograting on solid surfaces in air. It is also shown, based on the mechanism, that the nanograting period can be reduced by making use of shorter-wavelength lasers. Thus this project has successfully developed the fundamental principle and technique of a new nanoprocessing that can fabricate nanogratings with lasers beyond the diffraction limit.

我们已经证明，在介电，半导体和金属表面上被飞秒激光脉冲辐照的介质纳米结构形成由时间分辨的测量值主导。 为了建模纳米结构的物理过程，我们开发了一种新的消融技术来控制空间spp波模式的激发，并直接在空气中的实心表面上直接烙印均匀的纳米。 还根据该机制表明，可以通过使用较短的波长激光器来降低纳米流期。 因此，该项目成功地开发了一种新的纳米处理的基本原理和技术，该原理和技术可以用激光器超出衍射极限来制造纳米摩擦。

项目成果

Nanograting fabricated with femtosecond laser pulses

用飞秒激光脉冲制造纳米光栅

• DOI: 10.1117/2.1201210.004516
• 发表时间: 2012
• 期刊: SPIE Newsroom
• 作者: Atsushi Sugita;Yasuaki Sato;Kazuma Ito;Kenta Murakami;Yasuaki Tamaki;Nobuyuki Mase;Yoshimasa Kawata and Shigeru Tasaka;Kenji Tamasaku;G. Miyaji and K. Miyazaki
• 通讯作者: G. Miyaji and K. Miyazaki

Nanostructuring of Silicon Surface with Near-Field Enhanced in Femtosecond Laser Ablation

飞秒激光烧蚀近场增强硅表面纳米结构

• 发表时间: 2011
• 作者: G.Miyaji;K.Zhang;J.Fujita;K.Miyazaki
• 通讯作者: K.Miyazaki

Periodic Nanopattern Formation on Si with Femtosecond-Laser-Induced Surface Plamon Polaritons

用飞秒激光诱导表面等离激元在硅上周期性形成纳米图案

• 发表时间: 2012
• 期刊: Proceedings of the 13th International Symposium on Laser Precision Microfabrication
• 作者: Shota Yamada;Bong-Shik Song;Takashi Asano;Susumu Noda;K. Miyazaki and G. Miyaji
• 通讯作者: K. Miyazaki and G. Miyaji

Ultrafast dynamics in strong - field interactions with molecules and solid surfaces - High-harmonic generation and nanostructuring -

强场相互作用中的超快动力学与分子和固体表面-高次谐波产生和纳米结构-

• DOI: 10.1117/12.881821
• 发表时间: 2011
• 期刊: Proc. SPIE
• 作者: K.Miyazaki;G.Miyaji and K.Yoshii
• 通讯作者: G.Miyaji and K.Yoshii

Nanograting formation through surface plasmon fields induced by femtosecond laser pulses

• DOI: 10.1063/1.4826078
• 发表时间: 2013-10-21
• 期刊: JOURNAL OF APPLIED PHYSICS
• 影响因子: 3.2
• 作者: Miyazaki, Kenzo;Miyaji, Godai
• 通讯作者: Miyaji, Godai