Research on quantum behavior of a nanomechanical resonator

纳米机械谐振器的量子行为研究

• 批准号: 22656035
• 负责人: WARISAWA Shin'ichi
• 金额: $ 2.33万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22656035/
• 关键词: ナノメカニクス; 量子的挙動; 振動子; グラフェン; 集束イオンビーム化学気相 成長法; 超伝導ナノデバイス; 集束イオンビーム化学気相成長法; FIB-CVD; Q値; 歪印加; SQUID

This research focused on a graphene as a material of nano mechanical resonators. In order to improve the quality factor of the graphene resonator, the research proposed a new fabrication method of a graphene resonator. The method uses SU-8 as a material of supporting structure and can apply a tensile stress to the resonator by annealing to induce shrinkage of the supporting structure. The fabricated graphene resonator based on the proposed method showed more than 7000 of the quality factor at a room temperature, the value of which is the largest in the world as reported. The drastic improvement of the quality factor was discussed from supporting conditions, thermal elastic damping effects and quantum viewpoints as well.

这项研究的重点是石墨烯作为纳米机械谐振器的材料。为了提高石墨烯谐振器的品质因数，研究提出了一种新的石墨烯谐振器的制作方法。该方法使用SU-8作为支撑结构的材料，并且可以通过退火向谐振器施加拉应力以引起支撑结构的收缩。基于该方法制造的石墨烯谐振器在室温下表现出超过7000的品质因数，这是据报道的世界上最大的值。还从支撑条件、热弹性阻尼效应和量子角度讨论了品质因数的大幅提高。

项目成果

Ultra thin diamond-like carbon film mechanical resonator fabrication byacombined process of FIB-CVD and wet-etching

FIB-CVD与湿法刻蚀联合工艺制备超薄类金刚石碳膜机械谐振器

• 发表时间: 2010
• 作者: T. Hatakeyama;R. Kometani;S.Warisawa and S. Ishihara;J. Dai;S. Warisawa;T. Hatakeyama;米谷玲皇;R.Kometani
• 通讯作者: R.Kometani

Superconductivityof tungsten-containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition

聚焦离子束化学气相沉积法制备含钨碳纳米线的超导性

• 发表时间: 2012
• 作者: Jun Dai;R. Kometani;S.Warisawa;S. Ishihara;K. Onomitsu;Y. Krockenberger and H. Yamaguchi
• 通讯作者: Y. Krockenberger and H. Yamaguchi

架橋グラフェンの振動特性評価

交联石墨烯振动特性的评价

• 发表时间: 2010
• 作者: 畠山大輝;米谷玲皇;永瀬雅夫;割澤伸一;石原直
• 通讯作者: 石原直

Fabrication of Nanowire SQUID by means of FIB-CVD

通过 FIB-CVD 制备纳米线 SQUID

• 发表时间: 2011
• 作者: J. Dai;R. Kometani;S. Warisawa;and S. Ishihara
• 通讯作者: and S. Ishihara

Quality factor improvement of grapheme resonator by SU-8shrinkage-induced strain

SU-8收缩应变改善石墨烯谐振器的品质因数

• 发表时间: 2012
• 作者: Y. Oshidari;T. Hatakeyama;R.Kometani;S. Warisawa and S. Ishihara
• 通讯作者: S. Warisawa and S. Ishihara