Development of holonomic and omnidirectional precise inchworm mechanism for surface chip mounting technology

表面芯片贴装技术的完整全向精密尺蠖机构的开发

• 批准号: 22760183
• 负责人: FUCHIWAKI Ohmi
• 金额: $ 2.66万
• 依托单位: Yokohama National University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760183/
• 关键词: 精密機械システム; コンパクト生産システム; 独立三自由度; 圧電アクチュエーター; 電磁石; 表面実装技術; FF/FB制御; 過渡特性; 液架橋力; チップ部品; 動作補正; チップ実装; 微小液滴塗布; 圧電リニアモータ

Purpose of this research is to develop surface mounting technology used by precise 3 DOF omidirectional inchworm mobile mechanism. Achievements of this study are summarized as below,(1) Demonstration of pick & place method used by liquid briding force.(2) We have achieved improvement of the electromagnetic force to increase both of maximum velocity and positioning accuracy.(3) We have studied transient response of the mechanism and calculated optimal shape of the displacement of the piezoelectric actuators. We have also developed FF/FB control to get 0. 05μm positioning resolution for the mechanism in 1 axis. In experiments, we get the settling time down to 0. 05s when the target position is less than 30μm. We have also checked that the mechanism has good positioning repeatability, i. e. 3σof final position is 0. 09μm and average CV is 0. 5%.(4) We show our method has good feasiblity to decrease vibration, energy, size down to 1/1000 of conventional methods.

这项研究的目的是通过液体桥的改进来提高液态桥的挑选和位置，以概述这两个机制在压电的最佳状态下，我们还开发了FF/FB控制，以在1轴上获得0.05μm的定位。 09μm和平均CV为0.5％（4），我们表明我们的方法具有良好的振动，能量

项目成果

Development of the Precise Miniature Robot with 3 DOF-Improvement of Uniformity of Straight Motion and Maximum Speed

精密微型三自由度机器人的研制——提高直线运动的均匀性和最大速度

• 发表时间: 2010
• 作者: Kazushi Arafuka;Ohmi Fuchiwaki
• 通讯作者: Ohmi Fuchiwaki

Development of FF/FB Control Device for Precise Miniature Robot with 3 DOF

精密微型三自由度机器人FF/FB控制装置的研制

• 发表时间: 2010
• 作者: Suguru Omura;Ohmi Fuchiwaki
• 通讯作者: Ohmi Fuchiwaki

Development of Dispenser for High-Viscosity Liquid and Pick & Place of Micro Objects Using Capillary Force

高粘度液体及粘性点胶机的开发

• 发表时间: 2011
• 作者: Manabu Yatsurugi and Ohmi Fuchiwaki;Kazuya Kumagai and Ohmi Fuchiwaki
• 通讯作者: Kazuya Kumagai and Ohmi Fuchiwaki