Development of the micro-fabrication method for making specular surface by laser processing and wet etching

激光加工和湿法蚀刻镜面微加工方法的开发

• 批准号: 22760106
• 负责人: WAKABAYASHI Masaki
• 金额: $ 2.75万
• 依托单位: Tokyo Metropolitan Industrial Technology Research Institute
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760106/
• 关键词: レーザ加工; 微細加工; 精密加工; ガラス; Nd : YAGレーザ; エッチング; YAGレーザ

To enable processing of various mirror shapes in the micro-fabrication method for making specular surface by laser processing and wet etching, I investigated a combination of glass materials and the laser absorbing materials. The glass surface which was sputtered with copper or chrome was processed by YAG laser. However, it was difficult to fabricate mirror groove or cavity. On the other hands, a part of the epoxy based resin on the fused silica was removed by YAG laser, after wet etching for 4 hours, it was able to form 373μm in width, 31μm in depth, 33nmRa in surface roughness, a mirror groove as micro flow channels.

为了通过Yag Laser加工玻璃表面的玻璃表面，玻璃材料的组合和湿材料的组合可以通过Lasser加工和湿的ET投资来处理微型制作的各种镜面形状difficalt在Yag激光器上捏造镜子凹槽或腔。小时后，它能够形成373μm的宽度，深度为31μm，表面粗糙度为33nmra，镜面凹槽作为微流量。

项目成果

表面機能を創成するレーザ微細加工

激光微加工创建表面功能

• 发表时间: 2010
• 期刊: レーザ協会誌
• 作者: M.Okayasu;S.Takeuchi;T.Shiraishi;若林正毅
• 通讯作者: 若林正毅