Development of an Infrared Thomson Scattering System for Diagnostics of Processing Plasmas

开发用于诊断处理等离子体的红外汤姆逊散射系统

• 批准号: 10680462
• 负责人: UCHINO Kiichiro
• 金额: $ 1.92万
• 依托单位: KYUSHU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10680462/
• 关键词: Processing Plasma; Laser diagnostics; Thomson scattering; Infrared light; Electron density; Electron temperature; Reactive gases; Photon energy

When laser Thomson scattering is applied to discharges using reactive gases, there is a strong possibility that the laser pulse may perturb the discharges. Most of the reactions that a laser might induce, such as photo-detachment of electrons from negative ions and photo-dissociation of molecules, have a photon energy threshold. This project aimed to develop a new Thomson scattering system based on an infrared (low photon energy) laser for diagnostics of reactive plasmas and to examine conditions that the laser pulse disturbs the discharges. Also, the improvement of the lower detection limit for electron density was performed. Following results were obtained.(1) A Thomson scattering measurement system based on a 1.064 μm wavelength YAG laser was constructed. Scattering measurements showed that the results were comparable with those obtained using previous Thomson scattering systems that used visible lasers.(2) No evidence of laser perturbation was observed of ICP discharges using CFィイD24ィエD2 gas. However, the laser perturbation was observed at a wavelength 532 nm for a microwave discharge plasma produced in CHィイD24ィエD2 gas at a pressure of 20 Torr. These phenomena should be investigated in detail hereafter.(3) The lower detection limit of electron density was improved down to 5x10ィイD115 ィエD1 mィイD1-3ィエD1. This was achieved mainly by maximizing the detection solid angle, increasing shot numbers for data accumulation, and using a monochromator which has a specific characteristic of high stray light rejection.

当激光汤姆逊散射应用于使用反应气体的放电时，激光脉冲很可能会干扰激光可能引起的大多数反应，例如电子与负离子的光分离和光解离。该项目旨在开发一种基于红外（低光子能量）激光的新型汤姆逊散射系统，用于诊断反应等离子体并检查激光脉冲的条件。同时,对电子密度检测下限进行了改进。(1)构建了基于1.064μm波长YAG激光的汤姆逊散射测量系统。与使用以前使用可见激光的汤姆森散射系统获得的结果相当。(2) 使用 CFID24D2 气体的 ICP 放电没有观察到激光扰动的证据。在 20 Torr 压力下的 CH24D2 气体中产生的微波放电等离子体在波长 532 nm 处观察到扰动。这些现象应在下文中详细研究。(3) 电子密度的检测下限提高至 5x10 D115 D1。 D1-3 D1.这主要是通过最大化检测立体角、增加数据积累的拍摄次数以及使用单色仪来实现的。其具有高杂散光抑制的特定特性。

项目成果

M.D. Bowden, M. Kogano, Y. Suetome, T. Hori, K. Uchino, et al.: "Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques"Journal of Vacuum Science & Technology A. Vol. 17

M.D. Bowden、M. Kogano、Y. Suetome、T. Hori、K. Uchino 等人：“朗缪尔探针和激光汤姆逊散射技术制造的感应耦合等离子体中电子特性测量的比较”真空科学杂志

M.D. Bowden, M. Kogano, Y. Suetome, T. Hori, K. Uchino 他: "A Thomson scattering diagnostic system for measurement of electron properties of processing plasmas"Plasma Sources Science & Technology. 8・2. 203-209 (1999)

M.D. Bowden、M. Kogano、Y. Suetome、T. Hori、K. Uchino 等人：“用于测量处理等离子体的电子特性的汤姆森散射诊断系统”Plasma Sources Science & Technology 8・2。 (1999)

K.Muraoka,K.Uchino,M.D.Bowden: "Diagnosties of Low-Density Glow Discharge Plasmas Using Thomson Scattering" Plasma Physics and Controlled Fusion. 40. 1221-1239 (1998)

K.Muraoka、K.Uchino、M.D.Bowden：“利用汤姆逊散射诊断低密度辉光放电等离子体”等离子体物理和受控聚变。

K. Muraoka, K. Uchino, M.D. Bowden: "Diagnostics of Low-Density Glow Discharge Plasmas Using Thomson Scattering"Plasma Physics and Controlled Fusion. 40. 1221-1239 (1998)

K. Muraoka、K. Uchino、M.D. Bowden：“利用汤姆逊散射进行低密度辉光放电等离子体的诊断”等离子体物理和受控聚变。

M.D. Bowden, H. Kudo, K. Uchino, K. Muraoka, et al.: "A Thomson scattering measurement system based on an infrared laser"Japanese Journal of Applied Physics Part. 1. Vol. 38, No. 8. 4924-4925 (1999)

M.D. Bowden、H. Kudo、K. Uchino、K. Muraoka 等人：“基于红外激光的汤姆逊散射测量系统”日本应用物理杂志部分。