A Study on Anti-Vibration Control Using 5-Axes Magnetic Bearing for Structure

五轴磁力轴承结构减振控制研究

基本信息

批准号：
18560223
负责人：
WAKUI Shinji
金额：
$ 2.41万
依托单位：
Tokyo University of Agriculture and Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560223/
关键词：
Magnetic bearing Turbo molecular pump Anti-vibration Bending mode Feedforward

项目摘要

To suppress the vibration of mechanical structures, the tuning mass dampers, active mass dampers, and some kind of rubbers etc. have been commonly used. However, anti-vibration effect is limited and cannot set designedly. To overcome these circumstances, we formulate a plan that the turbo molecular pump is utilized to suppress the vibration. Since its pump is suspended by the magnetic bearings, then the reaction forces are easily generated by using the forced excitation based on the vibration signals. Namely we intend to realize the vacuum and anti-vibration functions simultaneously. In this research, by utilizing the radial control freedom of magnetic suspended rotor the objective is to demonstrate that the first and second bending modes of steel plate can be simultaneously suppressed.Firstly, the feedback control system is constructed based on the motional mode of rotor. Continuously, the feedforward control system to generate the reaction forces is implemented. Next, the steel plate is impacted by the hummer As a result, 1st and 2nd bending vibrations are suppressed using the feedforward signals under the condition of none rotation. Finally, the rotor is driven under the low vacuum environment realized by using the vane pump. The steel plate vibrations with 1st and 2nd bending can be suppressed under the condition 3,000rpm. Then we accomplish this research purpose successfully.

为了抑制机械结构的振动，通常使用了调谐质量阻尼器，主动质量阻尼器和某种橡胶等。但是，抗振动效果受到限制，无法设计。为了克服这些情况，我们制定了一个计划，即涡轮分子泵可用于抑制振动。由于其泵被磁轴承悬挂，因此通过基于振动信号的强制激发很容易产生反作用力。也就是说，我们打算同时实现真空和反振动功能。在这项研究中，通过利用磁性悬浮转子的径向控制自由度，目标是证明可以同时抑制钢板的第一和第二弯曲模式。首先，基于转子的运动模式，构建了反馈控制系统。连续地，实现了产生反作用力的前馈控制系统。接下来，钢板受到悍马的影响，在无旋转条件下，使用前馈信号抑制了第一和第二弯曲振动。最后，转子是在使用Vane泵实现的低真空环境下驱动的。在3,000rpm的情况下，具有第一和第二弯曲的钢板振动可以抑制。然后，我们成功完成了这一研究目的。