A Study on Improved Specification of an Absolute Displacement Sensor

绝对位移传感器改进技术研究

• 批准号: 23560253
• 负责人: WAKUI Shinji
• 金额: $ 3.41万
• 依托单位: Tokyo University of Agriculture and Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2013
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23560253/
• 关键词: 振動センサ; 絶対変位センサ; 制振; 除振; 振動子; 逆起電力; 周波数応答; モーダル解析; 速度; 加速度; 除振装置; 実験モーダル解析; アナログサーボ

An absolute displacement sensor has been proposed for anti-vibration. By using Grant-in-Aid for Scientific Research (C20560212), it has been shown that this sensor is effective as a feedback sensor. Then, we would like to apply the same sensor to semiconductor exposure apparatuses, however detection bandwidth and sensitivity were limited. To overcome these issues, a high sensitive method by increasing the number of coil turns was carried out. Next, sensitivity calibration and practical control tests were conducted. Finally, we conducted to suppress the resonances by Tuned Mass Damper. As a result, the resonances can be most suppressed by TMD. Moreover, we tried loading TMD in consideration of vibration modes, loading point, and constitution of TMD. The resonances were drastically suppressed by TMD on multiple points. In addition, we confirmed effects of high frequency dynamics and its suppression under the feedback of the absolute displacement sensor's velocity signal.

已经提出了一种绝对位移传感器来抗振动。通过科学研究补助金 (C20560212)，已证明该传感器作为反馈传感器是有效的。然后，我们希望将相同的传感器应用于半导体曝光设备，但检测带宽和灵敏度受到限制。为了克服这些问题，采用了增加线圈匝数的高灵敏度方法。接下来进行了灵敏度标定和实际控制测试。最后，我们通过调谐质量阻尼器来抑制共振。因此，TMD 可以最大程度地抑制共振。此外，考虑到振动模式、加载点和TMD的构成，我们尝试加载TMD。 TMD 在多个点上极大地抑制了共振。此外，我们还确认了绝对位移传感器速度信号反馈下的高频动力学效应及其抑制。

项目成果

Development of an Absolute Displacement Sensor and Its Improvement in High Frequency Region

绝对位移传感器的研制及其高频区的改进

• 发表时间: 2011
• 作者: Takashi Kai;Masaya Akiyama;Yukinori Nakamura;and Shinji Wakui
• 通讯作者: and Shinji Wakui

Vibration Control of an Air Type Anti-Vibration Apparatus with Two Degrees-of-Freedom Using Absolute Displacement Sensors

使用绝对位移传感器的空气式二自由度减振器的振动控制

• 发表时间: 2011
• 作者: K. Hiramoto;T. Matsuoka and K. Sunakoda;江本寛之 田代発造 三原毅 吉田洋樹;Takashi Kai and Shinji Wakui
• 通讯作者: Takashi Kai and Shinji Wakui

Experimental Modal Analysis of a Seismo-Type Velocity Sensor toward Bandwidth Expansion of an Absolute Displacement Sensor,

针对绝对位移传感器带宽扩展的地震型速度传感器的实验模态分析，

• 发表时间: 2012
• 作者: Takashi Kai;Takaaki Uemoto;Yukinori Nakamura;and Shinji Wakui
• 通讯作者: and Shinji Wakui

Evaluation of Seismic Absolute Displacement Sensors Based on Sensitivity Calibration and Control Tests of an Anti-Vibration Apparatus

基于抗振装置灵敏度标定和控制测试的地震绝对位移传感器评估

• 发表时间: 2013
• 作者: Takashi Kai;Yukinori Nakamura;and Shinji Wakui
• 通讯作者: and Shinji Wakui

絶対変位センサの高周波ダイナミクスの一抑制法

一种抑制绝对位移传感器高频动态的方法

• 发表时间: 2014
• 期刊: 日本機械学会論文集
• 作者: 嶋崎 守;岡部洋二;Mamoru SHIMAZAKI and Yoji OKABE;植本隆明,涌井伸二
• 通讯作者: 植本隆明,涌井伸二