Integrity Assessment of High-Performance Thin-Film Coated Materials by Meso-mechanics

通过细观力学评估高性能薄膜涂层材料的完整性

• 批准号: 18560078
• 负责人: HOSHIDE Toshihiko
• 金额: $ 2.32万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560078/
• 关键词: Thin-Film Coated Materials; Meso-mechanics; Integrity Assessment; Sputtering; Ceramics; Bending Strength; Hardness; Porosity; メゾメカニクス; Thin-Film Coated Materials; Meso-mechanics; Integrity Assessment; Sputtering; Ceramics; Bending Strength; Hardness; Porosity; メゾメカニクス

he durability of coated materials with higher performances should be adequately evaluated prior to their applications. This work aims at the establishment of procedure to estimate the durability of such materials. In the present work, the borosilicate glass was coated with ceramic films by the radio-frequency (RF) magnetron sputtering method, and mechanical properties of coated glass materials were investigated. At first, mechanical properties of materials coated with single ceramic film, alumina (Al_2O_3), silicon carbide (SiC) or titan nitride (TiN) were investigated. It was found that the strength properties are improved by coating ceramic materials on glass. As for the strength properties, TiN coated glass is superior to Al_2O_3 and SiC coated ones, though it was suggested that the surface properties of TiN coated material should be improved in its application. A new procedure to estimate the strength of coated materials was proposed by incorporating relative hardness and roughness with sputtering time. The strength in experiments was well estimated by using the proposed procedure. The possibility of a two-layer coating using Al_2O_3-SiC was also examined as a processing for the improvement. The measurements of surface roughness and porosity of coating film revealed that relatively smooth and dense coating films were formed under the sputtering condition adopted in this work. Thicker film was found to be harder because of the avoidance of effect due to softer glass substrate. Higher RF output power resulted in harder film. The bending strength was reduced by longer time of sputtering as well as porosity of coating film. By comparison with glass materials coated with single ceramics and the glass substrate, it was clarified that the strength and hardness of coated glass materials were improved by two-layer coating.

在应用之前，应对具有较高性能的涂层材料的耐用性进行充分的评估。这项工作旨在建立程序来估计此类材料的耐用性。在目前的工作中，通过射频（RF）磁控溅射方法将硼硅酸盐玻璃与陶瓷膜涂覆，并研究了涂层玻璃材料的机械性能。首先，研究了涂有单陶瓷膜的材料的机械性能，氧化铝（Al_2O_3），碳化硅（SIC）或硝酸钛（TIN）。发现通过玻璃上的陶瓷材料涂层陶瓷材料可以提高强度性能。至于强度性能，锡涂层玻璃优于Al_2O_3和SIC涂层的玻璃，尽管建议在其应用中应改进锡涂料材料的表面特性。通过将相对硬度和粗糙度与溅射时间结合在一起，提出了一种新的估计涂层材料强度的程序。通过使用建议的程序可以很好地估计实验中的强度。还检查了使用Al_2O_3-SIC进行两层涂层的可能性，以作为改进的处理。涂料膜的表面粗糙度和孔隙率的测量表明，在这项工作中采用的溅射条件下形成了相对光滑和致密的涂层膜。由于较软的玻璃基板避免了效果，因此发现较厚的薄膜更难。较高的RF输出功率导致了更硬的膜。通过溅射的时间和涂料膜的孔隙率较长的时间来降低弯曲强度。通过与涂有单个陶瓷和玻璃基板涂层的玻璃材料相比，澄清说，涂层玻璃材料的强度和硬度通过两层涂层改善。