Fabrication of High Performance Thick Film Magnets by Aerosol Deposition Method

气溶胶沉积法制备高性能厚膜磁体

• 批准号: 15360378
• 负责人: SUGIMOTO Satoshi
• 金额: $ 9.66万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15360378/
• 关键词: aerosol deposition method; thick film; permanent magnet; anisotropy; remanence; coercivity; deposition rate; film density; エアロゾルデポジション; 残留磁束密度; ビッカース強度; 微細結晶

1. PurposeRare earth magnets with small thickness are strongly demanded in the trend of downsizing motors and electromagnetic devices. The aerosol deposition (AD) method is one of the attractive methods for the fabrication of thick films with thickness of several μm to 500 μm. The deposition rate is around 5-50 μm/min, which 500-5000 times faster than conventional sputtering method. Therefore, in this investigation, we applied this method for the fabrication of high performance thick film magnets and investigated its possibility.2. Results(1) Fabrication of Sm-Fe-N AD Films and their Magnetic Properties : Since the thickness of Sm-Fe-N AD films fabricated on glass substrate was around 45 μm after deposition of 10 min, the thickness reached to 190 μm after the deposition using brass substrate. The deposition rate was estimated as 15-19 μm/min. The films showed the remanence (Br) of 0.4-0.6 T and the coercivities (μ_0H_<cJ>) increased from 1.6-1.8 T. These coercivities were higher than t … More hat of primary raw powders. The microvickers hardness of the AD films was around 500-700. The AD films consisted of α-Fe and Sm_2Fe_<17>N_x phases and the grain size was around 200-400 μm, which was one order smaller than that of primary powders.(2) Fabrication of anisotropic Sm-Fe-N AD Films : It is concluded that the c-axis of Sm-Fe-N has a tendency to align along the magnetic field by using magnets or solenoid coils. Especially, applying magnetic fields of 0.19 T in plane, the remanence measured along the applied field increased with increasing the magnetic field. The maximum value of remanence was 0.54 T, which was 29% higher than that without the applied field (0.42 T).(3) Possibility of Fe_3B/Nd_2Fe_<14>B Nanocomposite AD Films : Hysteresis loop and XRD analysis revealed that the raw powders was nanocomposite powders consisted of Fe_3B and Nd_2Fe_<14>B phase. The larger powder size of raw powders (12.45 μm) influenced the deposition rate and film thickness. The as-deposited AD film exhibited high remanence but low coercivity (H_<cJ>=0.84 kOe), though the film consisted of the Fe_3B and Nd_2Fe_<14>B phases. In addition, the coercivity further decreased by the annealing in Ar. These low coercivities were considered to be related to the relatively low anisotropy field of Nd_2Fe_<14>B phase, the defects induced during the AD method and the presence of α-Fe phase. Less

1.目的在电机和电磁装置小型化的趋势中，强烈需要小厚度的稀土磁体，气溶胶沉积（AD）方法是制造厚度为几μm至500μm的厚膜的有吸引力的方法之一。速度约为 5-50 μm/min，比传统溅射方法快 500-5000 倍，因此，在本研究中，我们应用这种方法来制造。结果(1) Sm-Fe-N AD 薄膜的制备及其磁性能: 由于在玻璃基板上制备的 Sm-Fe-N AD 薄膜的厚度约为 45 μm。沉积10分钟，使用黄铜基底沉积后厚度达到190μm，沉积速率估计为15-19μm/min，薄膜显示出剩磁(Br)。 0.4-0.6 T，矫顽力(μ_0H_<cJ>)从1.6-1.8 T增加。这些矫顽力高于初级原料粉末的显微维氏硬度在500-700左右。变为α-Fe和Sm_2Fe_<17>N_x相，晶粒尺寸在200-400左右μm，比初级粉末小一个数量级。(2)各向异性Sm-Fe-N AD薄膜的制备：得出Sm-Fe-N的c轴有沿磁场排列的趋势特别是，在平面上施加 0.19 T 的磁场，沿施加磁场测量的剩磁随着磁场的增加而增加，剩磁的最大值为 0.54 T。比无外加场（0.42 T）高29％。（3）Fe_3B/Nd_2Fe_<14>B纳米复合AD薄膜的可能性：磁滞回线和XRD分析表明，原料粉末是Fe_3B和Nd_2Fe_<14纳米复合粉末。 >B相。原料粉末的较大粉末尺寸（12.45μm）影响沉积速率和膜厚度。尽管该膜由Fe_3B和Nd_2Fe_<14>B相组成，但沉积态AD膜显示出高剩磁但低矫顽力(H_<cJ>=0.84kOe)。此外，通过在Ar中退火，矫顽力进一步降低。低矫顽力被认为与Nd_2Fe_<14>B相相对较低的各向异性场有关，AD过程中引起的缺陷法和α-Fe相的存在较少。

项目成果

杉本諭: "エアロゾル・デポジション法による永久磁石の薄型化"(社)日本応用磁気学会 第l32回研究会試料(2003年11月28日). 1-8 (2003)

Satoshi Sugimoto：“通过气溶胶沉积法减薄永磁体”，日本应用磁学学会，第 132 届研究会议样本（2003 年 11 月 28 日）1-8（2003 年）。

Nd_2Fe_<14>B/Fe_8B nanocomposite film fabricated by aerosol deposition method

气溶胶沉积法制备Nd_2Fe_<14>B/Fe_8B纳米复合薄膜

• 发表时间: 2006
• 期刊: Journal of Alloys and Compounds 408-412
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto
• 通讯作者: S.Sugimoto

Microstructure and Magnetic Properties of the Aerosol-Deposited Sm-Fe-N Thick Films

气溶胶沉积 Sm-Fe-N 厚膜的微观结构和磁性能

• 发表时间: 2004
• 期刊: IEEJ Trans.FM 124, 10
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto;S.Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;S.Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;S.Sugimoto;Tomohito Maki;Satoshi Sugimoto;小林亮平;槙 智仁;Tomohito Maki;Satoshi Sugimoto;Ryohei Kobayashi;Tomohito Maki
• 通讯作者: Tomohito Maki

Effect of applied field during aerosol deposition on the anisotropy of Sm-Fe-N thick films

气溶胶沉积过程中施加场对 Sm-Fe-N 厚膜各向异性的影响

• 发表时间: 2005
• 期刊: Journal of Magnetism and Magnetic Materials 290-291, part 2,
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto;S.Sugimoto
• 通讯作者: S.Sugimoto

HIGH SPEED FABRICATION OF SM-FE N THICK FILMS BY THE AFROSOL DEPOSITION METHOD.

采用 AFROSOL 沉积法高速制造 SM-FE N 厚膜。

• 发表时间: 2004
• 期刊: Proceedings of the 18th International Workshop on High Performance Magnets and their Applications Including the symposium Magnetic Micro-Actuators and Systems 2
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto;S.Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;S.Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;S.Sugimoto;Tomohito Maki;Satoshi Sugimoto;小林亮平;槙 智仁;Tomohito Maki;Satoshi Sugimoto;Ryohei Kobayashi;Tomohito Maki;Tomohito Maki;Satoshi Sugimoto;Tomohito Maki;槙智仁;S.SUGIMOTO
• 通讯作者: S.SUGIMOTO