Development of Indoor Environmental Improvement System by Using Nano Structural High Sensitivity Thin Film Gas Sensor

利用纳米结构高灵敏度薄膜气体传感器开发室内环境改善系统

基本信息

批准号：
14350153
负责人：
SUDA Yoshiaki
金额：
$ 4.74万
依托单位：
SASEBO NATIONAL COLLEGE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2005
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14350153/
关键词：
Nano structure Thin film gas sensor Environmental improvement SnO_2 WO_3 PLD method Ozonizer Dielectric thin film TiO_2

项目摘要

The purpose of this research is to combine the ozone deodorizations with the high sensitive and selective gas sensor and develop the indoor environmental improvement system.In this study, we prepared SnO_2, WO_3, ZnO, TiO_2 fims by pulsed Nd:YAG laser deposition (PLD) method. The surface morphology, crystalline structure, crystallographic orientation, composition ratio and bonding state of the films were analyzed by AFM, GXRD, FT-IR, XPS. Exprimental results suggest that the stoichimetric and crystalline SnO_2, WO_3, ZnO, TiO_2 flms can be prepared. We have succesfully deposited H_2 sensitive SnO_2-Pd thin films and NOx sensitive WO_3-Pd thin films using the new PLD In method combined with d.c. sputtering. Various dielectric thin films were prepared on the electrode surface of silent electrical discharge type ozonizer by sputtering method to get the highly effective ozonizer. The relation between the amount of the ozone generation and the discharge voltage and the dielectric thin film was clarified, and we succeeded in the development of highly effective ozonizer.In addition, the indoor environmental improvement system that combined a high sensitivity gas sensor, nitrogen dope TiO_2 photocatalyst, and highly effective ozonizer was developed.As mentioned above, the purpose of this research was achieved enough. In the future, an extremely new result is expected to be obtained by the development of the environmental improvement thin film material process using the pulsed laser and the development of the environmental improvement system using the ozonizer. It is very important to research the problem of this field aggressively from academic and an industrial viewpoint.A part of this research is published at a domestic and foreign science magazine and the academic society.The remainder of this research is scheduled to be made public one by one by the end of this year.

这项研究的目的是将臭氧除臭与高灵敏和选择性气体传感器结合起来，并开发室内环境改进系统。在这项研究中，我们通过脉冲ND：Yag Laser Deposing（PLD）方法准备了SNO_2，WO_3，ZnO，ZnO，TIO_2 FIMS。 AFM，GXRD，FT-IR，XPS分析了膜的表面形态，晶体结构，晶体学取向，组成比和键合状态。剥出结果表明可以准备stoichimetric和crystalline sno_2，wo_3，zno，tio_2 flms。我们使用新的PLD与D.C结合使用了新的PLD，成功地沉积了H_2敏感的SNO_2-PD薄膜和NOX敏感的WO_3-PD薄膜。溅射。通过溅射方法，在静默电排放型臭氧型臭氧型臭氧型臭氧的电极表面上制备了各种介电薄膜，以获得高效的臭氧化剂。阐明了臭氧产生的量与放电电压与介电薄膜之间的关系，我们成功地开发了高效的臭氧剂。此外，在室内环境改进系统中，将高灵敏度气体传感器，氮气毒化型TIO_2 tio_2 photocatalyst和高效的浓度卵核酸的目的相结合。将来，预计将使用脉冲激光器和使用Ozonizer的环境改进系统的开发来开发环境改进薄膜材料过程，从而获得一个极其新的结果。从学术和工业观点上积极研究该领域的问题非常重要。这项研究的一部分在国内和外国科学杂志和学术社会上发表。该研究的其余部分计划在今年末以一一公开。