Development of a System for Measurement of Properties of Flow is the CVD Apparatus Using LIF

开发使用 LIF 的 CVD 装置来测量流动特性的系统

• 批准号: 02555039
• 负责人: FUJIMOTO Tetsuo
• 金额: $ 6.78万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555039/
• 关键词: LIF; Iodine Molecule; Temperature Measurement; Two-dimensional Measurement; Visualized Image; High Sensitive CCD Camera; Laser Sheet; Picture Processing; 高感度ビジコンカメラ

As a system for measurement of properties of flow in the CVD apparatus, a method for quantitative imaging of temperature in the rarefied gas flow has been developed. The flow field is visualized by planar laserinduced fluorescence (PLIF) of iodine molecules seeded in carrier gas. Iodine molecules have many absorption lines in visible region and radiate intense fluorescence. The fluorescence intensity is proportional to the number of molecules in the energy level excited by the laser beam. From the dependence of this number on the temperature, the local temperature can be decided from the ratio of the fluorescence intensities of two visualized images which are obtained by irradiations of laser beams with different wave length. This method allows to image the two-dimensional temperature distribution of the flow field by means of a laser sheet and a high sensitive CCD camera. This method is applied to the temperature measurement of the flow field of a supersonic free jet in which temperature varies drastically. It is found that the temperature distribution of the jet measured by P(16)/R(18)[514.720 nm] and P(26)/R(28)[514.942 mn] absorption lines in the transition of B(v'=43) X(v"=0) agrees well with the theoretical one.This system was applied to an interacting flow field between a supersonic free jet and a Si wafer. From the result, the propriety and the effectiveness of the system are verified.

作为用于测量CVD设备中的流动特性的系统，已经开发了一种对稀薄气流中的温度进行定量成像的方法。通过载气中接种的碘分子的平面激光诱导荧光 (PLIF) 使流场可视化。碘分子在可见光区有许多吸收线并辐射出强烈的荧光。荧光强度与激光束激发的能级中的分子数量成正比。根据该数字对温度的依赖性，可以根据通过不同波长的激光束照射获得的两个可视化图像的荧光强度的比率来确定局部温度。该方法可以通过激光片和高灵敏度 CCD 相机对流场的二维温度分布进行成像。该方法适用于温度变化剧烈的超音速自由射流流场的温度测量。发现在 B(v'= 43) X(v"=0)与理论吻合较好。将该系统应用于超音速自由射流与硅片的相互作用流场。结果表明，该系统的正确性和有效性系统的内容均已验证。