Study of Detection Mechanism for Optically Readable Hydrogen Sensor

光可读氢传感器检测机理的研究

• 批准号: 13305060
• 负责人: TAKATA Masasuke
• 金额: $ 27.29万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13305060/
• 关键词: Hydrogen sensor; Paradium; Optical characteristics; Optical sensing; Spectroscopic ellipsometry; Durability; Sensitivity; Response; recovery; 室温作動; 光検知方式; 接合界面; バッファー層; ステアリン酸; Pd薄膜; パターン化; ポリエチレンテレフタレート; ポリカーボネート; 室温作動型; Pd; Y薄膜; Mg薄

To use hydrogen as a clean energy resource, it is essential to develop devices for detection of its leakage because hydrogen is explosive with wide range of concentration and low ignition energy. An optically readable hydrogen sensor is one of the most feasible candidates because of its excellent characteristics at room temperature and high safety. The sensor consists of a thin film of catalytic metal such as palladium(Pd) deposited on the glass substrate or the optical fiber end, and the change in optical properties of the film during hydrogenation is utilized for the hydrogen detection. This project was aimed at investigating the detection mechanism of the optically readable hydrogen sensor in order to improve the sensitivity, response/recovery property and the durability. The following results were obtained from the research.(1)The patterned Pd film on the glass substrate exhibited high sensitivity and durability. The sensitivity increased gradually with increasing hydrogen absorpti … More on-desorption cycle.(2)The Pd films on the polyethyleneterephthalate(PET) and polycarbonate(PC) substrates showed stable sensitivity compared to the film on glass substrate. The recovery time of the Pd/PET increased with increasing cycle. On the other hand, the Pd/PC sample had the stable repetition characteristic. From these results, it turned out that substrate material influenced the sensing characteristics.(3)The Pd/Y double-layered thin films had a great advantage of high sensitivity compared with the Pd film. The recovery time was controllable by controlling the thickness of Pd film.(4)The sensitivity of the Pd/Mg doubter-layered thin films was higher than that of Pd/Y films. From the optical measurement by spectroscopic ellipsometry, a considerable change in the dielectric function of the Pd/Mg film in hydrogen atmosphere was observed. The change suggested the decrease in the free electron density and the appearance of polarized electrons in hydrogen atmosphere.(5)The influence of Stearic Acid(SA) buffer layer on the durability and the sensitivity of an optically readable hydrogen sensor using Pd/SA/glass was investigated. The Pd/SA films showed high durability and sensitivity even after repeated hydrogen detection. Less

要将氢用作清洁能源，必须开发用于检测其泄漏的设备，因为氢具有爆炸性，浓度广泛，点火能量较低。具有光学可读性的氢传感器是最可行的候选者之一，因为其在室温和高安全性下具有出色的特征。该传感器由催化金属的薄膜组成，例如沉积在玻璃基板或光纤端的钯（PD），在氢化过程中膜的光学性质的变化用于氢检测。该项目旨在研究光学上可读性氢传感器的检测机制，以提高灵敏度，响应/恢复性能和耐用性。从研究中获得以下结果。（1）玻璃基板上的图案化PD膜暴露了高灵敏度和耐用性。灵敏度随着绝对氢化的氢的增加而逐渐提高。（2）与玻璃底物上的膜相比，在聚乙烯苯甲酸酯（PET）和聚碳酸酯（PC）底物上，PD膜在聚乙烯苯甲酸酯（PET）和聚碳酸酯（PC）底物上逐渐提高。 PD/PET的恢复时间随着周期的增加而增加。另一方面，PD/PC样品具有稳定的重复特征。从这些结果中可以证明，底物材料会影响敏感性特征。（3）PD/Y双层薄膜与PD/MG膜相比具有很高的敏感性。恢复时间通过控制PD/MG双层薄膜的敏感性来控制PD/MG双层薄膜的敏感性。椭圆测量法观察到了氢气大气中PD/mg膜的字典函数的考虑变化。该变化表明，使用PD/SA/玻璃研究了硬脂酸（SA）缓冲层对耐久性的影响（SA）缓冲层对耐久性和敏感性的影响。即使在重复进行氢检测之后，PD/SA膜即使在耐久性和灵敏度上都表现出较高的耐用性和灵敏度。较少的

项目成果

Y.Imai, J.Mercado, T.Okamoto, M.Takata: "Study on Optically Readable Hydrogen Sensor Consisting of Pd/Mg Thin Films by Spectroscopic Ellipsometry"Key Engineering Materials. 216. 101-104 (2002)

Y.Imai，J.Mercado，T.Okamoto，M.Takata：“利用光谱椭圆光法研究由Pd/Mg薄膜组成的光学可读氢传感器”关键工程材料。

Y.Imai, T.Okamoto, M.Takata: "Study on Optically Readable Hydrogen Sensor Consisting of Pd/Mg Thin Films by Spectroscopic Ellipsometry"Key Engineering Materials. 216. 101-104 (2002)

Y.Imai、T.Okamoto、M.Takata：《利用光谱椭圆光法研究Pd/Mg薄膜光学可读氢传感器》关键工程材料。

Y.Imai, Y.Okuhara, Y.Noguchi, M.Takata: "Optically Readable Hydrogen Sensor Using Pd/Y Double-layered Thin Films"Advances in Technology of Materials and Materials Processing Journal. 6[1]. 57-62 (2004)

Y.Imai、Y.Okuhara、Y.Noguchi、M.Takata：“使用 Pd/Y 双层薄膜的光学可读氢传感器”材料技术进展和材料加工杂志。

Y.Okuhara, Y.Imai, Y Noguchi, M.Takata: "Accelerative Hydrogen Desorption from Palladium Hydride for Responsive Optical Hydrogen Sensor"(in preparation for publication).

Y.Okuhara、Y.Imai、Y Noguchi、M.Takata：“响应式光学氢传感器的氢化钯加速氢解吸”（准备出版）。

K.Tanaka, T.Okamoto, M.Takata: "Patterning of Pd Thin Film for Optical Hydrogen Sensor by R.F.Magnetron Sputtering Method"(投稿予定). (2004)

K.Tanaka、T.Okamoto、M.Takata：“通过 R.F.磁控管溅射法对光学氢传感器的 Pd 薄膜进行图案化”（待提交）（2004 年）。