Fabrication and practical application of metallo-phthalocyanine thin film-based NO_2 gas sensor

金属酞菁薄膜NO_2气体传感器的制备及实际应用

基本信息

批准号：
12650343
负责人：
MURAKAM Kenji
金额：
$ 2.18万
依托单位：
Shizuoka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650343/
关键词：
NO_2 gas sensors organic thin film fluoroaluminmu phthalocyanine (AlFPc)substituted metallo-phthalocyanine gas response characteristics vacuum sublimation method asymmetric side chain molecular orientation NO2ガスセンサ分子線源銅フタロシアニン NO_

项目摘要

Copper phthalocyanine thin films with the thickness of 200 nm have shown good gas response characteristics in the NO_2 ambience at the operation temperature of 150 ℃, after the HF treatment of glass substrates. However, there are still some problems from the viewpoint of practical uses. Fabrication of very thin film is one of the methods to solve them. Reduction in the thickness of film is expected to lead a faster gas response and improved recovery characteristics. At the same time, reduction in the gas sensitivity may be caused. Fluoroaluminum phthalocyanine (AlFPc) molecules have a linear backbone (Al-F)_x surrounded by a stack of planar Pc rings, which may result in a high conductive very thin film.The AlFPc films with the thickness of 10 to 20 nm have been deposited on the non-treated glass substrate by using a vacuum sublimation method in the vacuum of 10^<-4> Pa range. The films have revealed an enough electric conductivity for the use of practical gas sensor element as expected … More . The gas response characteristics for the cycle of doping and dedoping of 1 ppm NO_2 gas have also showed the high gas sensitivity, the faster response rate and the good recovery characteristics even at the operation temperature of 80 ℃. These results can be interpreted by the specific array of the AlFPc molecules in the film and the decrease in diffusion of NO_2 gas molecules into the film. As a result, the very thin film based on AlFPc molecules is a promising material for the practical application to thin film-based NO_2 gas element.In order to fabricate a more highly oriented very thin film, substituted AlFPc molecules, fluoroaluminum tetra-t-butyl-phthalocyanine (AlFPc(C_4/H_9)_4) and fluoroaluminum octa-methyl-phthalocyanine (AlFPc(CH_3)_8) have been synthesized. Since both molecules have been substituted by the asymmetric groups, they may cause more specific arrays in the vacuum sublimed thin films. Furthermore, the substituted groups may improve the gas response characteristics due to their electron-donating effect on the AlFPc macrocycles. Indeed, the vacuum sublimed very thin films based on both substituted AlPcF molecules have shown the improved NO_2 gas response characteristics. The results also suggest that the substitution of AlFPc molecules is another approach to realize the practical thin film-based NO_2 gas sensors. Less

HF处理玻璃基板后，在150°C的运行温度下，在150°C的运行温度下，在NO_2的氛围中显示出良好的气体响应特性，铜邻苯二甲酸薄膜的铜phthalocyanine薄膜。但是，从实际用途的角度来看，仍然存在一些问题。制造非常薄的膜是解决它们的方法之一。预计膜厚度的减小将导致更快的气体反应和改善的恢复特性。同时，可能导致气体敏感性的降低。荧光肺细胞氨酸（ALFPC）分子具有线性主链（Al-f）_x，周围是一堆平面PC环，这可能会导致高导电性非常薄的膜。alfpc膜的厚度为10至20 nm的alfpc膜已沉积在未摄入的玻璃subumatation上，该方法的空位为10 nm的效果 - 使用了4-用效空的方法，该方法的空白效果 - 拟合的效果 - 均可用来效果。 PA范围。这些膜揭示了足够的电导率，用于使用预期的实际气体传感器元件。 1 ppm no_2气体的掺杂周期的气体响应特征也显示出高气体灵敏度，更快的响应率和良好的恢复特性，即使在80℃的运行温度下也是如此。这些结果可以通过膜中的AlfPC分子的特定阵列解释，并减少NO_2气体分子向膜中的扩散。结果，基于ALFPC分子的非常薄的膜是用于实际应用的有望材料，以在薄膜基于薄膜的NO_2气体元件上进行。为了制造更高度定向的非常薄的薄膜，取代的Alfpc分子，氟亚丁基Tetra-t-t-t-t-t-t-t-t-t-butyl-t-苯基 - 苯基 - 苯胺（alfl-phthalocyanine）（alfl-phalocyanine（alfl）（alfl-ailfpc（alfl）（c_4/h_4/h_9）和99）和99）。已合成了八甲基 - 邻苯烷氨酸（ALFPC（CH_3）_8）。由于两个分子都可能会在真空升华的薄膜中引起更具体的阵列。此外，由于对ALFPC大环的电子作用，取代的基团可以改善气体响应特性。实际上，基于两个取代的ALPCF分子的真空过滤的非常薄的膜已经显示出改善的NO_2气体响应特性。结果还表明，AlfPC分子的取代是实现实用的基于薄膜的NO_2气体传感器的另一种方法。较少的