Fabrication and Lasing Operation of Semiconductor Two-Dimensional Photonic Crystals

半导体二维光子晶体的制备和激光操作

基本信息

批准号：
10210203
负责人：
BABA Hideki
金额：
$ 42.05万
依托单位：
Yokohama National University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research on Priority Areas (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 2001
项目状态：
已结题

项目摘要

High performance and large scale integration required for next era photonic networks are difficult to realize within the present technology. Photonic crystals (PCs) allow the extremely strong optical confinement by their multi-dimensional periodic structures, ultrahigh speed and efficient light emission, and large scale integration by the high density optical wiring. In this study, we investigated semiconductor two-dimensional (2D) PC lasers and related technologies. 2D PCs with an in-plane periodicity has a less effective light control, but enables the easier fabrication, compared with 3D PCs. The introduction of a point defectprovides the in-plane resonance, which results in the Purcell effect and the thresholdless lasing operation. The introduction of a line defect provides a small optical waveguide with sharp bends, which can be used for high density optical wiring. However, at the first stage of the PC research, the structure needed a high aspect ratio process of semiconductors and a low surface recombination velocity material. This restricted applications of PCs. In our early study, we employed InP-based materials with a slow surface recombination velocity, and fabricated the 2D crystal exhibiting a characteristic spontaneous emission. In addition, we achieved a world smallest laser by a similar microstructure in this material. Based on these results, we realized simple structures and processes of the 2D PC and obtained the room temperature lasing operation in this study. In addition, we studied some related technologies, i.e., a high extraction efficiency LEDs, line defect photonic crystal waveguides, superprism filter and optical deflector based on peculiar dispersion characteristics, third order nonlinear photonic crystals and high efficiency input/output interfaces.

下一代光子网络所需的高性能和大规模集成在现有技术中很难实现。光子晶体（PC）通过其多维周期性结构、超高速和高效的光发射以及高密度光学布线的大规模集成，实现了极强的光学限制。在这项研究中，我们研究了半导体二维 (2D) PC 激光器及相关技术。与 3D PC 相比，具有面内周期性的 2D PC 的光控制效果较差，但制造起来更容易。点缺陷的引入提供了面内共振，从而产生珀塞尔效应和无阈值激光操作。线缺陷的引入提供了具有尖锐弯曲的小型光波导，其可用于高密度光布线。然而，在PC研究的第一阶段，该结构需要高深宽比的半导体工艺和低表面复合速度的材料。这限制了PC的应用。在我们的早期研究中，我们采用表面复合速度较慢的 InP 基材料，并制造了表现出特征自发发射的二维晶体。此外，我们通过这种材料的类似微观结构实现了世界上最小的激光器。基于这些结果，我们实现了二维PC的简单结构和工艺，并在本研究中获得了室温激光操作。此外，我们还研究了高提取效率LED、线缺陷光子晶体波导、基于特殊色散特性的超棱镜滤波器和光偏转器、三阶非线性光子晶体和高效输入/输出接口等相关技术。