Development of Evaluation System of Mechanical Properties of Multi-Thin Layrs by Ultra-Micro Indentation Test

超微压痕试验多层薄层力学性能评价系统的研制

• 批准号: 07555351
• 负责人: MURAKAMI Yukitaka
• 金额: $ 1.28万
• 依托单位: KYUSHU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555351/
• 关键词: Ultra-Micro Hardness; Multi Thin Layrs; Mechanical Property; Triangular Pyramidal Indentation; Elastic-Plastic Indentation Analysis; Nanoindentation; AFM; STM

(1) Software for elastic-plastic FEM analysis of a triangular pyramidal indentation on a multi-thin layrs is developed.(2) An 'ultra-micro indentation tester' is used to evaluate the Young's modulus of thin coatings. The relationship between the load and the penetration during unloading is used to determined the modulus. Indentation tests at gradually reducing ultimate load are carried out to determine the point at which the substrate material no longer has an influence on the deformation. After this point the unloading is a function of the coating modulus and the geometry of the indenter alone. This method is named the extrapolation method.(3) In the evaluation of Young's modulus of thin coatings by ultra-micro indentation tester, slow loading/unloading velocity tends to make ones overestimate the modulus due to creep deformation and/or vibrations from the outside of the system.(4) Nanoindentation measurement for tungsten (001) single crystal is conducted with an AFM ultra-micro hardness tester. For electrolytically-polished tungsten single crystal, sudden penetration occurred during indentation. This behavior does not occur for mechanically-polished surface. The relationship between the load and penetration coincides well with that calculated by elastic FEM analysis before the sudden penetration for electrolytically-polished tungsten single crystal. Therefore, electrolytically-polished tungsten single crystal is probably worth using as a standard material for an AFM ultra-micro hardness test.

(1)开发了多薄层三角锥压痕弹塑性有限元分析软件。(2)采用“超微压痕测试仪”评价薄涂层的杨氏模量。卸载过程中载荷与贯入度之间的关系用于确定模量。在逐渐降低极限载荷的情况下进行压痕试验，以确定基材材料不再对变形产生影响的点。此后，卸载仅取决于涂层模量​​和压头的几何形状。这种方法被称为外推法。 (3)在用超微压痕仪评估薄涂层的杨氏模量时，缓慢的加载/卸载速度往往会由于蠕变变形和/或来自外部的振动而高估模量。 (4)利用AFM超显微硬度计对钨(001)单晶进行纳米压痕测量。对于电解抛光的钨单晶，压痕过程中会发生突然的穿透现象。对于机械抛光的表面，不会发生这种现象。电解抛光钨单晶突入前的载荷与熔入度的关系与弹性有限元分析计算的结果吻合较好。因此，电解抛光钨单晶可能值得用作 AFM 超显微硬度测试的标准材料。

项目成果

増田正孝・林安徳: "セラミック被覆材の微小硬度と密着性" 「気相コーティングによる鉄鋼の表面高機能化」日本鉄鋼協会編. 30-35 (1995)

Masataka Masuda和Yasunori Hayashi：“陶瓷涂层材料的显微硬度和附着力”“通过气相涂层改善钢的表面功能”，日本钢铁研究所编辑30-35（1995）。

宮原健介・松岡三郎・長島伸夫・三島周三: "原子間力顕微鏡を基にした超微小硬さ試験機の開発" 日本機械学会論文集(A). 61巻590号. 2321-2328 (1995)

Kensuke Miyahara、Saburo Matsuoka、Nobuo Nagashima、Shuzo Mishima：“基于原子力显微镜的超显微硬度测试仪的开发”日本机械工程师学会汇刊（A）第 61 卷，第 590 期。 2328 (1995))

K.Miyahara・S.Matsuoka・N.Nagashima・S.Mishima: "Developement of a Nenoindenter on the Basis of an Atomic Force Microscope" Transactions of JSME (A). 61-590. 2321-2328 (1995)

K.Miyahara、S.Matsuoka、N.Nagashima、S.Mishima：“基于原子力显微镜的纳米压痕仪的开发”，JSME 61-590 (1995)。

S.Matsuoka・K.Miyahara・N.Nagashima K.Tanaka: "Measurement of Elastic Modulus and Yield Stress by AFM Ultra-Micro-Hardness Tester" Transactions of JSME (A). 62-598. 1432-1437 (1996)

S.Matsuoka、K.Miyahara、N.Nagashima K.Tanaka：“使用 AFM 超微硬度测试仪测量弹性模量和屈服应力”，JSME 交易 (A) 62-598 (1996)。

M.Masuda・Y.Hayashi: "Micro Hardness and Adhesivity of Ceramic Coated Steels" Surface Tailoring for Steels by Dry Coating, edited by The Iron and Steel Institute of Japan. 30-35 (1995)

M.Masuda·Y.Hayashi：“陶瓷涂层钢的微观硬度和附着力”干涂层钢的表面修整，日本钢铁研究所编辑30-35（1995）。