Research on Prototype of Sputtering Apparatus for Spinic Data Storage Media

自旋数据存储介质溅射装置原型研究

• 批准号: 07505004
• 负责人: NAKAMURA Yoshihisa
• 金额: $ 22.85万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07505004/
• 关键词: spinic data storage; perpendicular magnetic recording; high vacuum sputtering; hard disk; perpendicular double layr media

The research team is now investigating a new paradigm of magnetic recording, or "Spinic Storage, " for establishment of a new field of engineering, in which each recorded bit is stored in several single-domain crystallites in order to attain ultra-high density magnetic recording. The aim of this project is to initiate research on fabrication technology of recording media for this new strage scheme. It has been focused to provide a design guideline for the media. In particular, to optimize as a medium for high density recording, its micro magnetic structure of the recording layr is aimed to be clarified from physics of sputtering deposition.In early 1996, high vacuum sputtering apparatus having an aluminum chamber specialized for such high vacuum was built up, and background pressure of 10^<-8> Torr was confirmed. The apparatus was used for preparing high density magnetic recording disks for read/write experiments. The apparatus has been eventually attained much higher vacuum of 10^<-9> … More Torr in late 1996. Evaluation of read/write performance as a high density medium has been performed after optimization of sputtering conditions. The results described below have been obtained : (a) fine grain structure, which is indispensable for low noise magnetic recording media, appeared in recording layr of Co-Cr perpendicular anisotropy film, (b) higher vacuum brought better perpendicular anisotropy, and (c) compositional separation of the Co-Cr film was observed, therefore, (d) magnetic separation among the grains which acts to reduce medium noise was enhanced, however, (e) grain size became rather large, which affects the effect of increase the noise, and (f) in noise measurement its medium noise was smaller than samples by normal vacuum sputtering as a result.As described, the original requirements for the sputtering apparatus at the start of this project has been almost satisfied, and several knowledge for the high performance perpendicular media was obtained. The media prepared by the sputtering apparatus showed superior read/write characteristics, in particular its high SN ratio, after finishing its optimization of sputtering conditions. These results will be a first step of the ideal Spinic Storage Media, and it will be a basement for realization of ultra-high density recording. Less

研究团队现在正在研究建立一个新的工程领域的新的磁性记录范式或“旋转存储”范式，其中每个记录的位存储在几个单域Crystallites中，以便获得超高密度磁记录。该项目的目的是启动针对这种新的Strage计划录制媒体制造技术的研究。它一直专注于为媒体提供设计指南。特别是，为了优化作为高密度记录的介质，其记录LAYR的微磁性结构旨在从溅射沉积的物理学中阐明。在1996年初，高真空溅射设备具有专用于如此高的真空的铝室，并确认了10^<-8> TORR的背景压力。该设备用于制备用于读/写实验的高密度磁记录磁盘。该设备最终获得了10^<-9>的更高真空…在1996年末的更多Torr。在优化溅射条件后，已经执行了将读/写作作为高密度培养基的评估。以下所述的结果已经获得：（a）在记录Co-Cr的垂直偶然偶然薄膜的记录中出现的细粒结构是必不可少的，这是必不可少的。 （e）晶粒尺寸变得很大，这会影响增加噪声的效果，并且（f）在噪声测量中，其中等噪声比正常的真空溅射小于样品。如所述，在该项目开始时，对溅射设备的原始要求几乎满足了，并且获得了高性能垂直媒体的几种知识。通过溅射设备制备的培养基在完成溅射条件的优化后，表现出了出色的读/写特征，尤其是其高SN比。这些结果将是理想的旋转存储介质的第一步，它将是实现超高密度记录的地下室。较少的

项目成果

清水幸也: "三次元シミュレータによる垂直記録媒体のノイズ解析" 日本応用磁気学会誌. (印刷中)21. (1997)

Yukiya Shimizu：“使用三维模拟器进行垂直记录介质的噪声分析”日本应用磁学学会杂志（正在出版）21。（1997）

H.Yamada, H.Muraoka, Y.Nakamura, I.Abe and K.Yazawa: ""High resolution read out with an MR head in perpendicular magnetic recording" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

H.Yamada、H.Muraoka、Y.Nakamura、I.Abe 和 K.Yazawa：““垂直磁记录中使用 MR 磁头进行高分辨率读出”（日文，印刷中）” J.Magn.Soc.Jpn

Y.Sano, H.Muraoka, I.Watanabe and Y.Nakamura: ""Effects of nitrogen addition to the CoCr recording layr of a double layred perpendicular rigid disk"" J.Magn.Magn.Mat.155. 212-215 (1996)

Y.Sano、H.Muraoka、I.Watanabe 和 Y.Nakamura：“双层垂直刚性磁盘 CoCr 记录层中氮添加的影响”J.Magn.Magn.Mat.155。

中塩栄治,渡辺功,村岡裕明,中村慶久: "軟磁性膜の成膜における液体窒素シュラウドの効果" 平成7年度電気関係学会東北支部連合大会. 2B. 77- (1995)

Eiji Nakashio、Isao Watanabe、Hiroaki Muraoka、Yoshihisa Nakamura：“液氮护罩对软磁薄膜形成的影响”1995 日本电气工程师联合会东北分会 77- (1995)。

E.Nakasio, T.Sakaguchi, I.Watanabe, H.Muraoka and Y.Nakamura: ""Effect of background pressure for sputtering of Co-Cr film" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

E.Nakasio、T.Sakaguchi、I.Watanabe、H.Muraoka 和 Y.Nakamura：“背景压力对 Co-Cr 薄膜溅射的影响”（日语，印刷中）”J.Magn.Soc.Jpn。