Research on Prototype of Sputtering Apparatus for Spinic Data Storage Media

自旋数据存储介质溅射装置原型研究

• 批准号: 07505004
• 负责人: NAKAMURA Yoshihisa
• 金额: $ 22.85万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07505004/
• 关键词: spinic data storage; perpendicular magnetic recording; high vacuum sputtering; hard disk; perpendicular double layr media

The research team is now investigating a new paradigm of magnetic recording, or "Spinic Storage, " for establishment of a new field of engineering, in which each recorded bit is stored in several single-domain crystallites in order to attain ultra-high density magnetic recording. The aim of this project is to initiate research on fabrication technology of recording media for this new strage scheme. It has been focused to provide a design guideline for the media. In particular, to optimize as a medium for high density recording, its micro magnetic structure of the recording layr is aimed to be clarified from physics of sputtering deposition.In early 1996, high vacuum sputtering apparatus having an aluminum chamber specialized for such high vacuum was built up, and background pressure of 10^<-8> Torr was confirmed. The apparatus was used for preparing high density magnetic recording disks for read/write experiments. The apparatus has been eventually attained much higher vacuum of 10^<-9> … More Torr in late 1996. Evaluation of read/write performance as a high density medium has been performed after optimization of sputtering conditions. The results described below have been obtained : (a) fine grain structure, which is indispensable for low noise magnetic recording media, appeared in recording layr of Co-Cr perpendicular anisotropy film, (b) higher vacuum brought better perpendicular anisotropy, and (c) compositional separation of the Co-Cr film was observed, therefore, (d) magnetic separation among the grains which acts to reduce medium noise was enhanced, however, (e) grain size became rather large, which affects the effect of increase the noise, and (f) in noise measurement its medium noise was smaller than samples by normal vacuum sputtering as a result.As described, the original requirements for the sputtering apparatus at the start of this project has been almost satisfied, and several knowledge for the high performance perpendicular media was obtained. The media prepared by the sputtering apparatus showed superior read/write characteristics, in particular its high SN ratio, after finishing its optimization of sputtering conditions. These results will be a first step of the ideal Spinic Storage Media, and it will be a basement for realization of ultra-high density recording. Less

研究小组目前正在研究一种新的磁记录范例，即“自旋存储”，以建立一个新的工程领域，其中每个记录的位都存储在几个单域微晶中，以获得超高密度磁该项目的目的是启动对这种新存储方案的记录介质的制造技术的研究，特别是为该介质提供设计指南，以优化其作为高密度记录的介质。记录层的微磁结构为1996年初，建立了专门用于这种高真空的具有铝室的高真空溅射装置，并确认使用了10 ^ -8 Torr的背景压力。准备用于读/写实验的高密度磁记录盘。该设备最终在 1996 年底达到了 10^<-9> … More Torr 的更高真空度。作为高密度介质的读/写性能的评估。在优化溅射条件后进行了以下结果：(a)在Co-Cr垂直各向异性薄膜的记录层中出现了低噪声磁记录介质所必需的细晶结构，(b)更高的晶粒结构。真空带来了更好的垂直各向异性，并且（c）观察到Co-Cr薄膜的成分分离，因此，（d）晶粒之间的磁分离增强了，其起到降低介质噪声的作用，但是，（e）晶粒尺寸变得相当大，影响了增加噪声的效果，并且(f)在噪声测量中其介质噪声比普通真空溅射的样品要小。如上所述，本发明开始时对溅射设备的原始要求项目已经基本满意，并且获得了关于高性能垂直介质的一些知识，在完成溅射条件的优化后，该溅射设备制备的介质表现出优异的读/写特性，特别是其高信噪比。是第一步理想的Spinic存储介质，它将成为实现超高密度记录的基础。

项目成果

Y.Sano, H.Muraoka, I.Watanabe and Y.Nakamura: ""Effects of nitrogen addition to the CoCr recording layr of a double layred perpendicular rigid disk"" J.Magn.Magn.Mat.155. 212-215 (1996)

Y.Sano、H.Muraoka、I.Watanabe 和 Y.Nakamura：“双层垂直刚性磁盘 CoCr 记录层中氮添加的影响”J.Magn.Magn.Mat.155。

中塩栄治,渡辺功,村岡裕明,中村慶久: "軟磁性膜の成膜における液体窒素シュラウドの効果" 平成7年度電気関係学会東北支部連合大会. 2B. 77- (1995)

Eiji Nakashio、Isao Watanabe、Hiroaki Muraoka、Yoshihisa Nakamura：“液氮护罩对软磁薄膜形成的影响”1995 日本电气工程师联合会东北分会 77- (1995)。

清水幸也: "三次元シミュレータによる垂直記録媒体のノイズ解析" 日本応用磁気学会誌. (印刷中)21. (1997)

Yukiya Shimizu：“使用三维模拟器进行垂直记录介质的噪声分析”日本应用磁学学会杂志（正在出版）21。（1997）

H.Yamada, H.Muraoka, Y.Nakamura, I.Abe and K.Yazawa: ""High resolution read out with an MR head in perpendicular magnetic recording" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

H.Yamada、H.Muraoka、Y.Nakamura、I.Abe 和 K.Yazawa：““垂直磁记录中使用 MR 磁头进行高分辨率读出”（日文，印刷中）” J.Magn.Soc.Jpn

E.Nakasio, T.Sakaguchi, I.Watanabe, H.Muraoka and Y.Nakamura: ""Effect of background pressure for sputtering of Co-Cr film" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

E.Nakasio、T.Sakaguchi、I.Watanabe、H.Muraoka 和 Y.Nakamura：“背景压力对 Co-Cr 薄膜溅射的影响”（日语，印刷中）”J.Magn.Soc.Jpn。