Three-dimensional nanofabrication system for laser-driven micromachines

用于激光驱动微机械的三维纳米加工系统

• 批准号: 06555121
• 负责人: KAWATA Satoshi
• 金额: $ 10.18万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555121/
• 关键词: nanofabrication; evanescent wave; radiation force; micromachine; stereolithography; two-photon absorption; ケノ形成; FDTD

We tried to use the radiation force from the evanescent field, which is generated on the waveguide, for driving some kinds of micromachines.1) Analysis of the radiation force generated for micro-movers and design of micro-moversThe methods for calculating the radiation force were established by ourselves. Our methods base on boundary element method (BEM) and extended Mie's theory. The shape and refractive index of a micro-mover, which can transfer the energy of light to the kinetic energy of micro-mover efficiently, were examined by the methods. The calculation results showed that the efficiency of the energy transfer can be increased by using the resonance effect of light in case that the relative refractive-index of a micro-mover is greater than 1.5 approximately.2) Fabrication of a micro-mover with UV-cured resinWe developed a three-dimensional microfabrication technique in order to make some kinds of micro-movers. In the fabrication technique, a point in three-dimensional volume of UV-cured resin is photopolymerized through two-photon absorption process with a near-IR laser beam. A 3-D structure can be made by scanning the focused point of the near-IR laser beam. The resolution of our system have attained 1 mum nearly.3) Experiments on drive of micro-moversWe drove some kinds of micro-movers with the evanescent field generated on the channeled waveguide. The micro-movers we used are dielectric and metal particles whose diameter is 1-5mum. The light source we used is Nd : YLF laser whose oscillating wavelength is 1047mum. In the experiments, particles were trapped within the extent of the evanescent filed generated on the waveguide, and longitudinally ran along the waveguide. The velocity and the distance of the movement were near ten microins per second and over 1 cm, respectively.

我们试图利用从波导上产生的逃生场的辐射力来驱动某些微机械。1）我们建立了用于计算辐射力的微型摩压的辐射力和设计的辐射力的分析。我们的方法基于边界元素方法（BEM）并扩展了MIE的理论。通过这些方法检查了微移位的形状和折射率，可以有效地将光能将光的能量传递到微型射击的动能。计算结果表明，可以使用光的共振效应在微型转移的相对折射率大约大于1.5左右。2）用UV-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-Con-conte的结果表明，可以提高能量传递的效率。在制造技术中，三维体积的紫外线树脂中的一个点通过近IR激光束通过两光子吸收过程进行光聚合。可以通过扫描近IIR激光束的聚焦点来制作3-D结构。我们系统的分辨率已达到1个妈妈。3）关于微型摩擦的驱动的实验，驱动了某些微型射击，并在通道波导上产生的evanevaneScent场。我们使用的微移动物是直径为1-5MM的介电和金属颗粒。我们使用的光源是ND：YLF激光器的振荡波长为1047MUM。在实验中，将颗粒捕获在波导上产生的逃生的范围内，并沿波导纵向运行。速度和运动的距离分别为每秒十粒和超过1 cm。