Research on Nano-meter order Assembly System

纳米级组装系统研究

基本信息

批准号：
04555054
负责人：
HATAMURA Yotaro
金额：
$ 13.57万
依托单位：
the University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

1.Realization of concentrated motion manipulator : Taking account of micro object handling tasks, we make clear the necessary functions of a manipulator to execute micro object handling. A new design concept of "concentrated motion manipulator" suitable for small object handling is proposed and a new manipulation system besed on the concept is designed and realized. The manipulator has 7 D.F.F.'s with nano-meter order positional accuracy. The main feature of the manipulation system is that motion of the manipulator is concentrated to the center of the field of view of a microscope to ensure task execution with visual monitoring.2.Realization of stereo-scopic SEM (Scanning Electron Microscope) : A stereo SEM is realized to visualize 3D-image of the nano-meter scale world. In the realized SEM, a stereo image (left eye image and right eye image) as well as multi-resolutonal images (local high magnification image and global wide field of view image) can be obtained by controlling the elect … More ron beam in video rate.3.Prevention of fatal damage by means of operation understanding function by robot : In micro task execution, the operator frequently breaks the object by mistake, becouse the object is much more smaller and weaker than the object in our macro world. To cope with this problem, we realized the fatal damage prevention function based on the robot understanding of operator behavior. This function is realized by the following steps : a)recognition ofan operator's intension, b)prediction of the task status, c)warning to the operator and guidance to escape from the fatal damage in case of dangerous prediction.4.Realistic display of nano-meter world task execution : Force sensor attached to the tip of the manipulator hand and work table is utilized to generated the acoustic sound to let the operator know what is going on in the task execution world. This display enables the operator to recognize the status of the task execution which is quite different from that of our macro world.5.Assembly experiment of nano-meter accuracy : Developed system components stated above (concentrated motion manipulatoe, realistic display of nano-meter world task execution, computer aided fatal damage prevention) are finally integrated to realize nano-mater accuracy task execution system. Such micro task execution of assembly of micro machines as well as the repair of micro patterns are successfully performed to probe the correctness of the developed components. Other than such micro machine assembly task of a micro air-turbine(502 micron diameter), a micro-Torii(100 micron hight), micro five storied temple tower(230 micron hight), curving of micro kokeshi(200 micron diameter Japanese doll) and folding of micro airplane (from 1 mm square aluminum foil) are also completed. Less

1.集中运动机械臂的实现：考虑到微小物体搬运任务，明确了机械臂执行微小物体搬运所需的功能，提出了一种适合小物体搬运的“集中运动机械臂”的新设计理念。在此基础上设计并实现了具有纳米级位置精度的7个D.F.F.的新型操纵系统。该操纵系统的主要特点是操纵器的运动集中。显微镜视场的中心，以确保视觉监控任务的执行。2.立体SEM（扫描电子显微镜）的实现：实现立体SEM以可视化纳米级世界的3D图像。在实现的SEM中，通过控制电子束，可以获得立体图像（左眼图像和右眼图像）以及多分辨率图像（局部高倍图像和全局宽视场图像）。 3.通过机器人的操作理解功能防止致命损坏：在微观任务执行中，操作者经常会错误地破坏物体，因为物体比我们宏观世界中的物体小得多、弱得多。针对这个问题，我们实现了基于机器人对操作者行为的理解的致命伤害预防功能，该功能通过以下步骤实现：a）识别操作者的意图，b）预测任务状态，c）警告。操作员和逃生指导4.真实显示纳米世界任务执行：利用附着在机械手手尖和工作台上的力传感器产生声音，让操作者知道发生了什么这种显示使操作者能够识别与我们宏观世界截然不同的任务执行状态。5.纳米级精度的组装实验：开发了上述系统组件（集中运动机械手，真实的展示最终集成了纳米世界任务执行、计算机辅助致命损伤预防等，实现了纳米级精度任务执行系统，成功地完成了微型机器组装的微任务执行以及微图案的修复，以探测其正确性。除了微型空气涡轮机（直径502微米）、微型鸟居（100微米高）、微型五层寺庙塔（230微米高）、弯曲微型木芥子（200微米直径的日本娃娃）和微型飞机（由1毫米方形铝箔制成）的折叠也已完成。