THE METHODS TO AVOID THE FORMATION OF METALLIC SILICIDE AT THE INTERFACE OF METAL/SILICON NITRIDE, AND THEIR APPLICATION FOR JOININGS

避免金属/氮化硅界面形成金属硅化物的方法及其在连接中的应用

基本信息

批准号：
03650562
负责人：
ATARASHIYA Koji
金额：
$ 1.34万
依托单位：
HOKKAIDO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

项目摘要

THE KINETICS AND MECHANISM OF HIGH TEMPERATURE REACTIONS OF METALS WITH SILICON NITRIDE WERE INVESTIGATED. IT WAS THE PURPOSE OF THE PRESENT INVESTIGATION TO DESCRIBE THE CONDITIONS TO FORM NO BRITTLE PRODUCTS AT THE INTERFACE OF METAL/SILICON NITRIDE. THE PAUCITY OF REPORTS ON MECHANICAL PROPERTIES OF SOME METAL SILICIDES AND THE SOLID SOLUTIONS OF METAL AND SILICON SYSTEMS PROMPTED US TO INVESTIGATE THEM. MECHANICAL STRENGTH, YOUNG'S MODULUS AND LINEAR THERMAL EXPANSION COEFFICIENTS OF THE SILICIDES AND SOLID SOLUTIONS WERE MEASURED. BECAUSE THE SOLID SOLUTIONS WERE DUCTILE THEY APPEARED TO BE SUITABLE FOR JOINING. USING PLATE LIKE SAMPLES OF METALS AND SILICON NITRIDE, THE REACTION LAYERS WERE OBSERVED. IN THE CASE OF NICKEL, ONLY A SOLID SOLUTION LAYER WAS FORMED WITHOUT ANY SILICIDES AT 1273 K AND 1373 K. METALS SILICIDE LAYERS WERE FORMED IN THE CASES OF IRON AND COBALT EVEN AT 1173 K. THE SILICON CONTENT OF NICKEL SOLID SOLUTION WERE VERY LOW AND ITS DISTRIBUTION WAS UNIFORM. AND THE REACTION KINETICS OBEYED THE LINEAR RATE LAW. THUS, THE RATE DETERMINING STEP WAS THE DECOMPOSITION REACTION OF SILICON NITRIDE. THE REACTION RATE CONSTANT CAN BE EXPRESSED AS FOLLOWS: k(ms^<-1>) = 2.0 x 10^<-4> exp(-165kJmol^<-1>/RT). USING POWDERED METAL-SILICON NITRIDE MIXTURES, THE REACTION BEHAVIORS WERE OBSERVED BY MEANS OF MEASUREMENTS OF THE LIBERATED NITROGEN DURING THE REACTIONS. THE RESULTS OF THE EXPERIMENTS AGREED APPROXIMATELY WITH THOSE OF BLOCK SAMPLES. FURTHERMORE, THE ALLOYING ELEMENTS SUCH AS ALUMINUM, TITANIUN AND CHROMIUM IN NICKEL ALLOY PROMOTED THE DECOMPOSITION OF SILICON NITRIDE. BUT, THE LARGE AMOUNTS OF THEM HAD A BAD EFFECT ON THE SOLID-SOLUTION FORMATIONS TO FORM NITRIDE AND SILICIDE OF THE ALLOYING ELEMENTS.

研究了金属与氮化硅高温反应的动力学和机制。本研究的目的是描述在金属/氮化硅界面上不形成脆性产物的条件。关于某些金属硅的机械性能以及金属和硅系统的实心溶液的报道很少，促使我们调查它们。测量了机械强度，Young的模量和线性热膨胀系数和固体溶液。由于固体溶液是延展的，它们似乎适合连接。使用像金属样品和氮化硅样品，观察到反应层。在镍的情况下，仅在1273 K和1373 K处形成一个固体溶液层，即使在1173 K时，在铁和钴的情况下也形成了金属硅层。镍实心溶液的硅含量非常低。它的分布是统一的。反应动力学遵守线性速率定律。因此，确定步骤的速率是氮化硅的分解反应。反应速率常数可以表示如下：k（ms^<-1>）= 2.0 x 10^<-4> exp（-165kjmol^<-1>/rt）。使用粉状的金属二硅氮混合物，通过在反应过程中测量解放的氮观察到反应行为。实验的结果大致与块样品的结果一致。此外，镍合金中的铝，钛和铬等合金元素促进了氮化硅的分解。但是，它们的大量对形成合金元件的氮化物和硅化剂的固定构造产生了不良影响。