Development of High-Level Design System for Raising the Performance of Surface-Acoustic-Wave Devices

开发用于提高声表面波器件性能的高级设计系统

• 批准号: 01550297
• 负责人: KOSHIBA Masanori
• 金额: $ 1.47万
• 依托单位: Hokkaido University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1989
• 资助国家: 日本
• 起止时间: 1989 至 1990
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01550297/
• 关键词: Surface acoustic wave (SAW); SAW interdigital transducer; SAW reflector; SAW resonator; Finite element method; Numerical analysis; Coupled mode theory; Equivalent network theory

The performance of a CAD system for the design of SAW (surface acoustic wave) devices is limited by the accuracy of the simulation procedure. A precise simulation of SAW devices must take into account pure electric, acoustic, and mixed electroacoustic effects. The purpose of this project is to develop an high-level design system for various SAW devices. Results obtained are as follows:1. A numerical approach based on the finite element method has been developed for the analysis of arbitrarily shaped periodic SAW waveguides which frequently appear in the actual SAW devices, such as SAW interdigital transducer (IDT), SAW reflector, and SAW resonator.2. An equivalent network theory and a coupled mode theory are developed for the analysis of excitation characteristics of SAW-IDT and of reflection characteristics of SAW qratings. Circuit parameters of equivalent networks and coupling and transduction coefficients of coupled mode equations can be theoretically determined by applying the finite element method to an infinite array corresponding to an electrically shorted or open IDT. The finite element method is also used to calculate the static capacitance for one pair of IDTs.3. A unified numerical approach based on the finite element method is developed for the magnetostatic wave propagation in a YIG film.

用于 SAW（表面声波）器件设计的 CAD 系统的性能受到模拟过程精度的限制。 SAW 器件的精确仿真必须考虑纯电效应、声学效应和混合电声效应。该项目的目的是为各种 SAW 器件开发高级设计系统。得到的结果如下： 1．开发了一种基于有限元方法的数值方法，用于分析实际SAW器件中经常出现的任意形状的周期性SAW波导，如SAW叉指换能器(IDT)、SAW反射器和SAW谐振器。 2．建立了等效网络理论和耦合模式理论来分析 SAW-IDT 的激励特性和 SAW 额定值的反射特性。通过将有限元方法应用于对应于电短路或开路IDT的无限阵列，理论上可以确定等效网络的电路参数以及耦合模式方程的耦合和换能系数。还采用有限元法计算了一对IDT的静态电容。3．针对 YIG 薄膜中的静磁波传播，开发了一种基于有限元方法的统一数值方法。

项目成果

K. Hasegawa and M. Koshiba: "Finite-Element Solution of Rayleigh-Wave Scattering from Reflective Gratings on a Piezoelectric Substrate" IEEE Transactions on Ultrasonics, Ferroelectics, and Frequecy Control. Vol. 37. 99-105 (1990)

K. Hasekawa 和 M. Koshiba：“压电基板上反射光栅瑞利波散射的有限元解决方案”IEEE 超声波、铁电学和频率控制汇刊。

M. Koshiba, K. Hasegawa, and K. Inagawa: "An Analysis of Excitation Characteristics of Interdigital Transducers for Surface Acoustic Waves" Japanese Journal of Applied Physics. Vol. 28. 105-107 (1989)

M. Koshiba、K. Hasekawa 和 K. Inakawa：“表面声波叉指换能器的激励特性分析”日本应用物理学杂志。

小柴 正則: "固体と液体の境界面をもつ超音波導波路の有限要素法解析" 電子情報通信学会論文誌. J73ーCーI. 580-586 (1990)

Masanori Koshiba：“具有固液界面的超声波导的有限元方法分析”电子、信息和通信工程师学会学报 J73-C-I (1990)。

K. Inagawa and M. Koshiba: "Theoretical Determination of Equivalent Network Parameters for Interdigital SurfaceーAcousticーWave Transducers" The Transactions of the Institute of Electronics, Information and Communication Engineers. Vol. J73-C-I. 731-737 (19

K. Inakawa 和 M. Koshiba：“叉指表面声波换能器等效网络参数的理论确定”电子、信息和通信工程师学会会刊 J73-C-I。

長谷川弘治: "Finite-Element Solution of Rayleigh-Wave Scattering from Reflectivle Gratings on a Piezoelectric Substrate" IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control.

Hiroharu Hasekawa：“压电基板上反射光栅瑞利波散射的有限元解决方案”IEEE Transactions on Ultrasonics、Ferroelectrics 和频率控制。