Crystallography of Thin Metal Film Deposited onto Planar and Spherical Metal Substrates

沉积在平面和球形金属基底上的金属薄膜的晶体学

基本信息

批准号：
63550473
负责人：
KATO Masaharu
金额：
$ 1.34万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1988
资助国家：
日本
起止时间：
1988 至 1989
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-63550473/
关键词：
Thin film Deposition Crystallography Epitaxy Interface FIM 真空蒸着エピタキシャル方位関係

项目摘要

During the two-year period of this project, the following achievements have been made.1. A new deposition apparatus with better vacuum has been constructed using the equipment budgets of this Grant-in-Aid.2. Copper and iron were chosen, one as a deposit crystal and the other as a substrate crystal. (1) Familiar orientation relationships, such as the Kurdjumov-Sachs (K-S) relationship, were found between deposit and substrate crystals when low-index substrate planes were used. On the other hand, several new orientation relationships were found to exist on some higher-index substrate planes. (2) Iron deposited on copper as thin film layers with domain structure. However, copper deposited on iron as many fine islands.3. Iron was deposited on an [001]-oriented needle-like specimen of copper. The semi-spherical tip of the specimen was examined on a field-ion microscope (FIM). It has been found that four separate regions of iron film exist around the [001] pole and each region shows the K-S relationship to the copper substrate.4. In the light of the experimental results, the following three factors have been identified critical in determining epitaxial relationships on given substrate orientations: (1) the Bain correspondence between the two crystals, (2) the good matching of the two crystals at the interface, and (3) minimization of misfit strain energy.5. Using the infinitesimal-deformation approach, the crystallography of martensites or precipitates in a bulk material has also been discussed theoretically.

该项目实施两年来，取得了以下成果： 1．使用本次补助金的设备预算建造了一种具有更好真空度的新型沉积设备。2。选择铜和铁，一种作为沉积晶体，另一种作为基底晶体。 (1) 当使用低折射率衬底平面时，在沉积物和衬底晶体之间发现了熟悉的取向关系，例如 Kurdjumov-Sachs (K-S) 关系。另一方面，在一些较高折射率的基底平面上发现了一些新的取向关系。 (2)铁沉积在铜上作为具有域结构的薄膜层。然而，铜在铁上沉积了许多细小的岛屿。3．铁沉积在[001]取向的针状铜样品上。在场离子显微镜（FIM）上检查样本的半球形尖端。研究发现，[001]极周围存在四个独立的铁膜区域，每个区域与铜基体均呈现K-S关系。 4．根据实验结果，确定了以下三个因素对于确定给定衬底方向上的外延关系至关重要：（1）两个晶体之间的贝恩对应关系，（2）两个晶体在界面处的良好匹配， (3)失配应变能最小化。5．使用无穷小变形方法，还从理论上讨论了块体材料中马氏体或析出物的晶体学。