3D microscopy by using acoustic wave and electron beam

使用声波和电子束的 3D 显微镜

• 批准号: 61550285
• 负责人: SUGA Hiroshi
• 金额: $ 0.7万
• 依托单位: Osaka Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1986
• 资助国家: 日本
• 起止时间: 1986 至 1987
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-61550285/
• 关键词: Acoustic microscopy; 3D Microscopy; 赤外線顕微鏡; ホログラム顕微鏡; 超音波ホログラム顕微鏡

The main of this project is to get some bacic concepts of three dimensional microscopy which is especially for observing inner structure of various small devices such as integrated circuits. We obtained the following two new resulys. 1. An acoustic image arising from the three dimensional stucture was observed. Two acoustic transtic transducers and one specially made piezoelectric film were set on each side of right prism. In this arrangement,acoustic image on the film was observed by the scanning electrn microscope. 2. Because infrared light penetratc some of specimens like silicon wafer as good as acoustic wave,it is also used to see through the inside of the specimen three dimensionally with the stereoscopic technique.

该项目的主要目的是获得三维显微镜的一些基本概念，特别是用于观察集成电路等各种小型器件的内部结构。我们获得了以下两个新结果。 1.观察由三维结构产生的声学图像。右棱镜两侧各设置两个声波穿越换能器和一块特制的压电薄膜。在这种布置下，通过扫描电子显微镜观察薄膜上的声学图像。 2.由于红外光对硅片等某些样品的穿透力与声波一样好，因此也可利用立体技术来三维透视样品的内部。

项目成果

菅博,小寺正敏: 電子情報通信学会論文誌. 70. (1987)

Hiroshi Suga、Masatoshi Kodera：《电子、信息和通信工程师学会汇刊》70。（1987）

Masatoshi Kotera, Hiroshi Suga: "A simulation of keV electron scattering in a charged-up spacimen" Journal of Applied Physics. 63,No.2. 261-268 (1988)

Masatoshi Kotera、Hiroshi Suga：“充电太空中 keV 电子散射的模拟”应用物理学杂志。