Development of vacuum ultraviolet Ar_2 excimer laser by laser-heated plasma pumping

激光加热等离子体泵浦真空紫外Ar_2准分子激光器的研制

基本信息

批准号：
12450034
负责人：
OKADA Tatsuo
金额：
$ 6.34万
依托单位：
Kyushu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

项目摘要

In order to realize a practical Ar_2 excimer laser, we have proposed a new pump scheme to deposit a high power density into a high pressure Ar gas without discharge instability[7-9], In this scheme, a pre-ionized high-pressure Ar gas is irradiated by an intense CO_2 laser beam. The initial electrons are accelerated and heated by the electric field of the CO_2 laser, and an Ar gas is effectively ionized. The advantage of this scheme is that a rapid and intense energy deposition into the gas plasma is possible without being limited by discharge instability. In this paper, we report the vacuum ultraviolet emission characteristics from such a laser-heated high pressure Ar plasma.As the results, a 100 mm-long linear plasma was successfully produced in an Ar gas at a pressure of 20 atmospheres by heating the pre-ionized Ar gas with a TEA CO_2 laser. The VUV emission at 126 nm from the Ar_2 excimers was observed. Although no clear evidence of the stimulated emission has been observed yet, the results indicate that the plasma was produced by a proposed mechanism, not by a simple laser-breakdown. In the present experimental setup, the main components such as pre-ionizer and a set of focusing mirror are installed in a high-pressure gas chamber. This causes some problems in terms of the purity of gas, the pre-ionization and an optical alignment. We are further optimizing the system for the realization of the stimulated emission at 126 nm.

为了实现实用的AR_2准分子激光器，我们提出了一种新的泵方案，将高功率密度沉积到高压AR气体中，而无需放电的不稳定[7-9]，在此方案中，预取离的高压AR气体由强烈的CO_2激光束辐照。初始电子被CO_2激光的电场加速并加热，并且AR气体有效地将其电离。该方案的优点是，可以在不受排放不稳定性的情况下限制气体血浆中的快速而强烈的能量沉积。在本文中，我们报告了这种激光加热的高压AR等离子体的真空紫外线发射特性。结果，结果，通过将预电离的AR气体加热的AR气体在20个气氛下成功地在AR气体中成功产生了100 mm的线性等离子体。观察到来自AR_2准分子的126 nm处的VUV发射。尽管尚未观察到尚未观察到刺激发射的明确证据，但结果表明血浆是由提出的机制产生的，而不是通过简单的激光破裂。在当前的实验设置中，将诸如先前离世和聚焦镜之类的主要组件安装在高压燃气室中。这在气体的纯度，预电之前和光学对齐方面引起了一些问题。我们正在进一步优化系统，以实现126 nm处的刺激发射。