High-speed nanometer synchronous position control of semiconductor exposure apparatus by new control method

新控制方法对半导体曝光装置的高速纳米同步位置控制

• 批准号: 14350122
• 负责人: TSUJI Teruo
• 金额: $ 9.34万
• 依托单位: Kyushu Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350122/
• 关键词: predictive control; IC production equipment; robust; acceleration control; Taguchi method; filter; two-degree-of-freedom control; ball screw; 半導体露光装置; 同期制御; リニアモータ; 動特性; サーボ系; 共振; 位置決め; 予測制御; 同期誤差; 加速度フィードバック; 2慣性系; 剛体系

It proposed the control method to attempt accuracy and high-speed improvement, and the performance was verified by the experiment in a positional control of the IC production equipment Three themes were set, and researched.1)Proposal and experiment on method of dual predictive controlThe response of the main axis in the future is predict from the model, and a positional predict will be input as a reference in the predictive control system of the trailing axis in the future. The deflection in the future can be reduced by setting the evaluation function of the deflection predict value in the future, and minimizing the value, hi a highly accurate, synchronous control between two axes, the following results were obtained by the simulation and the experiment. A positional predict will be accurately done in a dual predict in the future of the model predict system. A synchronous error margin of the double predictive control is fewer than that of the classics control in the simulation and the … More experiment that inputs the trapezoid velocity reference. The difference was four times or more. Moreover, the dual predictive control was excelled, and not influenced comparatively by turbulence in robustness. A regular, synchronous error margin occurred when the constant velocity movement reference was input.2)High-speed positioning control by Taguchi methodThe PI acceleration control loop was added to a conventional P-PI control system. The bandwidth of the acceleration sensor is 5 kHz. The bandwidth of the acceleration control system becomes about 500Hz. This was a field on practical use intimately. Moreover, the best parameters were set experimentally as minimized Integral Absolute Error by using Taguchi method, hi one axis servo system that had used a linear motor, it shortened greatly from 100ms to 5ms in positioning settling time. The turbulence control performance has improved by ten times.3)Stabilization of machine resonance and improvement of responseStabilization and the response of one axis stage where some machine resonances exist are improved. The method used the notch filter and the low-pass filter and the method of two degree of freedom control system with feed forward and feedback was designed. Considering the vibration mechanism into the control system, and effective in the vibration control and shortening the positioning time were verified by the experiment. Less

它提出了尝试和高速改进的控制方法，并设定了IC生产设备的L实验。模型和位置预测将作为将来的HE尾轴的参考控制系统。在模拟系统的未来和……更多的经验中，差异是通过模型的未来。稳定性的湍流是输入的此外.3）机器的稳定和一个轴阶段的响应改进了一些机械的方法。进行控制系统，并在振动控制中有效，并缩短了积极时间

项目成果

A Proposal of a Position Control with Acceleration Feedback Loops (An Application to a Ball Screw Drive One-axis Stage)

一种带加速度反馈环的位置控制方案（滚珠丝杠驱动单轴平台的应用）

• 发表时间: 2002
• 期刊: The 1st Korea-Japan Conference on Positioning Technology
• 作者: Shigeru Futami

サーボ系の最適イナーシャ比についての考察(第1報)

伺服系统最佳惯量比的思考（第1次报告）

• 发表时间: 2004
• 期刊: 2004年度精密工学会秋季大会学術講演会
• 作者: 浜松 弘;Hiroshi Hamamatsu;Shigeru Futami;浜松 弘;二見 茂;浜松 弘;佐藤 啓仁;浜松 弘;佐藤 啓仁;Shigeru Futami;佐藤 啓仁;佐藤 啓仁;二見 茂
• 通讯作者: 二見 茂

浜松 弘: "ボールねじ駆動機構における共振抑制フィルタ設計"日本機械学会Dynamics and Design Conference 2003講演会論文集. No.03-7(CD-ROM). 6 (2003)

Hiroshi Hamamatsu：“滚珠丝杠驱动机构的共振抑制滤波器设计”日本机械工程学会动力学与设计会议论文集2003年第03-7号（CD-ROM）6（2003年）。

浜松 弘: "ボールねじ駆動テーブルにおける重力軸の機械モデル同定"日本機械学会九州支部第56期総会講演会論文集. No.038-1. 189-190 (2003)

Hiroshi Hamamatsu：“滚珠丝杠传动工作台中重力轴的机械模型识别”日本机械工程学会九州分会第56次大会论文集No.038-190（2003）。

ボールねじ駆動テーブルにおける重力軸の機械モデル同定

滚珠丝杠传动工作台重心轴机械模型辨识

• 发表时间: 2003
• 期刊: 日本機械学会九州支部第56期総会講演会論文集
• 作者: 浜松 弘