High-speed nanometer synchronous position control of semiconductor exposure apparatus by new control method

新控制方法对半导体曝光装置的高速纳米同步位置控制

• 批准号: 14350122
• 负责人: TSUJI Teruo
• 金额: $ 9.34万
• 依托单位: Kyushu Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350122/
• 关键词: predictive control; IC production equipment; robust; acceleration control; Taguchi method; filter; two-degree-of-freedom control; ball screw; 半導体露光装置; 同期制御; リニアモータ; 動特性; サーボ系; 共振; 位置決め; 予測制御; 同期誤差; 加速度フィードバック; 2慣性系; 剛体系

It proposed the control method to attempt accuracy and high-speed improvement, and the performance was verified by the experiment in a positional control of the IC production equipment Three themes were set, and researched.1)Proposal and experiment on method of dual predictive controlThe response of the main axis in the future is predict from the model, and a positional predict will be input as a reference in the predictive control system of the trailing axis in the future. The deflection in the future can be reduced by setting the evaluation function of the deflection predict value in the future, and minimizing the value, hi a highly accurate, synchronous control between two axes, the following results were obtained by the simulation and the experiment. A positional predict will be accurately done in a dual predict in the future of the model predict system. A synchronous error margin of the double predictive control is fewer than that of the classics control in the simulation and the … More experiment that inputs the trapezoid velocity reference. The difference was four times or more. Moreover, the dual predictive control was excelled, and not influenced comparatively by turbulence in robustness. A regular, synchronous error margin occurred when the constant velocity movement reference was input.2)High-speed positioning control by Taguchi methodThe PI acceleration control loop was added to a conventional P-PI control system. The bandwidth of the acceleration sensor is 5 kHz. The bandwidth of the acceleration control system becomes about 500Hz. This was a field on practical use intimately. Moreover, the best parameters were set experimentally as minimized Integral Absolute Error by using Taguchi method, hi one axis servo system that had used a linear motor, it shortened greatly from 100ms to 5ms in positioning settling time. The turbulence control performance has improved by ten times.3)Stabilization of machine resonance and improvement of responseStabilization and the response of one axis stage where some machine resonances exist are improved. The method used the notch filter and the low-pass filter and the method of two degree of freedom control system with feed forward and feedback was designed. Considering the vibration mechanism into the control system, and effective in the vibration control and shortening the positioning time were verified by the experiment. Less

它提出了一种控制方法，以尝试准确和高速改进，并通过实验对IC生产设备的位置控制进行了验证，并研究了三个主题。1）对双重预测控制方法的提议和实验未来的主轴响应未来的响应是由模型预测的，并且位置预测将在预测量系统中输入。通过设置偏转的评估函数可以减少未来的挠度，并最大程度地降低该值，这是两个轴之间高度准确的同步控制，以下结果是通过模拟和实验获得的。位置预测将在模型预测系统的未来双重预测中准确地进行。双重预测控制的同步误差缘少于模拟中经典控制的同步误差和…输入梯形速度参考的更多实验。差异是四次或更多。此外，双重预测控制非常出色，并且不受稳健性湍流的影响。当输入恒定速度运动参考时，就会发生常规的同步误差边距。2）通过Taguchi方法进行高速定位控制，将PI加速度控制回路添加到常规的P-PI控制系统中。加速度传感器的带宽为5 kHz。加速控制系统的带宽变为500Hz。这是一个亲密使用的领域。此外，通过使用Taguchi方法，使用线性电动机的一个轴伺服系统，将最佳参数设置为最小化的积分绝对误差，它在定位沉降时间中从100ms缩短到5ms。湍流控制性能提高了十倍。3）机器共振的稳定和改善的响应能力以及一个轴阶段的响应得到了改善。该方法使用了Notch滤波器和低通滤波器，设计了带有进料的两个自由度控制系统的方法。实验验证了振动机理到控制系统中，并在振动控制和缩短定位时间方面有效。较少的

项目成果

A Proposal of a Position Control with Acceleration Feedback Loops (An Application to a Ball Screw Drive One-axis Stage)

一种带加速度反馈环的位置控制方案（滚珠丝杠驱动单轴平台的应用）

• 发表时间: 2002
• 期刊: The 1st Korea-Japan Conference on Positioning Technology
• 作者: Shigeru Futami

サーボ系の最適イナーシャ比についての考察(第1報)

伺服系统最佳惯量比的思考（第1次报告）

• 发表时间: 2004
• 期刊: 2004年度精密工学会秋季大会学術講演会
• 作者: 浜松 弘;Hiroshi Hamamatsu;Shigeru Futami;浜松 弘;二見 茂;浜松 弘;佐藤 啓仁;浜松 弘;佐藤 啓仁;Shigeru Futami;佐藤 啓仁;佐藤 啓仁;二見 茂
• 通讯作者: 二見 茂

浜松 弘: "ボールねじ駆動機構における共振抑制フィルタ設計"日本機械学会Dynamics and Design Conference 2003講演会論文集. No.03-7(CD-ROM). 6 (2003)

Hiroshi Hamamatsu：“滚珠丝杠驱动机构的共振抑制滤波器设计”日本机械工程学会动力学与设计会议论文集2003年第03-7号（CD-ROM）6（2003年）。

浜松 弘: "ボールねじ駆動テーブルにおける重力軸の機械モデル同定"日本機械学会九州支部第56期総会講演会論文集. No.038-1. 189-190 (2003)

Hiroshi Hamamatsu：“滚珠丝杠传动工作台中重力轴的机械模型识别”日本机械工程学会九州分会第56次大会论文集No.038-190（2003）。

Hiroshi Hamamatsu: "Filter design for resonance repression of ball screw driving table"International Symposium on Bio-inspired Systems PartV International Workshop on Robotics and Motion Control. 51-56 (2004)

Hiroshi Hamamatsu：“滚珠丝杠驱动台共振抑制的滤波器设计”仿生系统国际研讨会PartV机器人与运动控制国际研讨会。