High Power Hydrothermal PZT Film and its Application to Transducers

高功率水热PZT薄膜及其在换能器中的应用

基本信息

批准号：
11450135
负责人：
KUROSAWA Minoru
金额：
$ 8.64万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11450135/
关键词：
piezoelectric material PZT PZT thin film transducer vibrator actuator sensor vibration verocity

项目摘要

High intensity vibration characteristics of the hydrothermaly deposited PZT thin film ultrasonic vibrator was examined. It was found that the hydrothermal deposition PZT film transducer had the superior characteristics at high intensity vibration condition. In case of bulk piezoelectric material, the transducer has non linear response against the variation of the frequency. However, the hydrothermal PZT film transduecer had linear response enven in high intensity vibration operation. We fabricated a transducer whose dimenstions were 1 mm wide, 7.8 mm long and 1.2 mm thick, then vibration characteristics was measured. The transducer which was 15 times deposition process and 38 μm PZT thick produced 2.24 m/sec vibration velocity at the driving voltage of 145 Vp-p. This value was more than 2 times of a bulk PZT material for high power application. Moreover, it was close to a crystal piezo material such as litium niobate transducer of 3 m/sec. It seems that the hydrothermal PZT h!as poly crysital structure, hence it has superior characteristics at high intensity vibariton operation.we examined the preprocess of the titanium treatment, then the piezoelectric constant was improved up to 2 times of the previouse one. A novel process of elector chemical method was tried. Large amount of deposition was obtained in short time reaction. Farther investigation is required for this point. Sonochemical method was also tried, but it requires deep investigation.

对水热沉积PZT薄膜超声振动器的高强度振动特性进行了研究，发现水热沉积PZT薄膜换能器在高强度振动条件下具有优越的特性，对于块体压电材料，换能器具有非线性响应。然而，水热PZT薄膜传感器即使在高强度振动操作下也具有线性响应，我们制造了尺寸为1毫米宽的传感器，长7.8毫米、厚1.2毫米，然后测量经过15次沉积工艺、38μm PZT厚度的传感器在145Vp-p的驱动电压下产生2.24m/秒的振动速度，该值大于2。此外，它似乎接近 3 m/sec 的铌酸锂传感器等晶体压电材料。水热PZT具有多晶结构，因此在高强度振动操作中具有优越的特性。我们研究了钛处理的预处理，压电常数提高到以前的2倍，这是一种新颖的电极工艺。尝试了化学方法，在短时间内反应获得了大量沉积，这一点还需要进一步研究，但需要深入研究。