Development of X-ray telescope with ultra thin mirror substrate machined by diamond turning

金刚石车削超薄镜基片X射线望远镜的研制

• 批准号: 05452018
• 负责人: TAWARA Yuzuru
• 金额: $ 4.22万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05452018/
• 关键词: X-ray telescope; X-ray optics; super precision machining; coating; surface microroughness

We have studied the development of high throughput X-ray telescope using diamond-turned very thin aluminum mirror substrates. In this study, there are following points to research and develop ; production of mirror substrate, production of smooth mirror surface, deposition of metals for X-ray reflecting mirror surface, design and fabrication of mirror support and their alignment mechanics, development of X-ray facility and X-ray measurement for telescope performance.On the fabrication of mirror substrate, we have made 0.3 mm thick mirror substrate made by diamond-turned machining and found that it had the shape to give us 1.7 arcmin HPD performance for 2 stage system and also found the surface roughness can be reduced down to 1 mm by acrylic coating, but X-ray performance is not enough high for low scattering X-ray mirror.On the development of the thin foil mirror profiler with high precision, we have designed and fabricated it assembling laser displacement sensor and precision Z-stage. This system has been connected to the advanced system, namely ultra-precision 3-D cylindrical mirror profiler. To reduce the surface roughness of diamond-turned aluminum foil substrate, we have also tried to make similar mirror with non-spherical polishing technique for nickel coated aluminum surface. For such small sample mirror, we have found that hey have enough smooth surface for X-ray mirror. For Wolter type I mirror made by the same way, its high imaging capability was confirmed as it has small HPD of less than 5 arcsec.

我们研究了使用金刚石车削的非常薄的铝镜基板开发高通量 X 射线望远镜。本研究主要有以下几点需要研究和开发；反射镜基底的生产、光滑反射镜表面的生产、X射线反射镜表面的金属沉积、反射镜支撑件及其对准机构的设计和制造、X射线设备的开发以及望远镜性能的X射线测量。镜面基板的制造，我们通过金刚石车削加工制成了 0.3 毫米厚的镜面基板，发现它的形状可以为 2 级系统提供 1.7 arcmin HPD 性能，并且还发现表面粗糙度可以降低至 1 毫米通过丙烯酸涂层，但对于低散射X射线镜来说，X射线性能还不够高。在高精度薄箔镜轮廓仪的研制上，我们设计并制造了装配激光位移传感器和精密Z台的薄箔镜轮廓仪。该系统已与先进的超精密3D柱面镜轮廓仪系统连接。为了降低金刚石车削铝箔基体的表面粗糙度，我们还尝试用非球面抛光技术对镀镍铝表面制作类似的镜面。对于如此小的样品镜，我们发现它们具有足够光滑的表面用于X射线镜。对于以相同方式制造的Wolter I型反射镜，其高成像能力得到证实，因为它具有小于5角秒的小HPD。

项目成果

K.Tamura^a, K.Yamashita^a, H.Kunieda^a, Y.Tawara^a, A.Furuzawa^a, K.Haga^a, G.S.Lodha^a N.Nakajo^a, N.Nakamura^a, Takashi Okajima^a, Osamu Tsuuda^a P.J.Serlemitsos^b, J.Tueller^b, R.Petre^b Y.Ogasaka^b, Y.Soong^b and K.Chan^b: "Development of balloon-born

K.Tamura^a、K.Yamashita^a、H.Kunieda^a、Y.Tawara^a、A.Furuzawa^a、K.Haga^a、G.S.Lodha^a N.Nakajo^a、N.Nakamura^

Y.Tawara, K.Yamashita.H.Kunieda et al.: "Multitager Supermirror Coating for Hald X-ray Telescope" SPIE. 2805. 236-243 (1996)

Y.Tawara、K.Yamashita.H.Kunieda 等人：“用于 Hald X 射线望远镜的多标签超级镜面涂层”SPIE。

Yuzuru Tawara^1, Koujun Yamashita^1, Hideyo Kunieda^1, Kazutoshi Haga^1, Kazuya Akiyama^1, Akihiro Furuzawa^1, Yuichi Terashima^1, Peter J.Serlemitsos^2: "Multilayr Supermirror Coating for Hard X-Ray Telescope" SPIE. Vol.2805. 236-243 (1996)

Yuzuru Tawara^1、Koujun Yamashita^1、Hideyo Kunieda^1、Kazutoshi Haga^1、Kazuya Akiyama^1、Akihiro Furuzawa^1、Yuichi Terashima^1、Peter J.Serlemitsos^2：“用于硬 X- 的多层超级镜面涂层

K.Tamura, K.Yamashita, Y.Tawara et al.: "Development of balloon-borne hald X-ray telescope using multifager Supermirror" SPIE. 3113. 285-292 (1997)

K.Tamura、K.Yamashita、Y.Tawara 等人：“使用 multifager Supermirror 开发气球载哈德 X 射线望远镜”SPIE。

Y.Tawara et al.: "Diamond-turned very thin mirror for high-throughput X-ray telescope" SPIE,Multilayer and Grazing Incidence X-ray/EUV Optics II. 2011. 177-181 (1993)

Y.Tawara 等人：“用于高通量 X 射线望远镜的金刚石车削非常薄的镜子”SPIE，多层和掠入射 X 射线/EUV 光学 II。