Preparation and Properties of Thin Film by Plasma-Assisted CVD for CO_2 Laser Lens

CO_2激光透镜等离子体辅助CVD薄膜的制备及性能

• 批准号: 63890015
• 负责人: NAKAMURA Shigeaki
• 金额: $ 3.9万
• 依托单位: National Takamatsu College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1988
• 资助国家: 日本
• 起止时间: 1988 至 1990
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-63890015/
• 关键词: CO_2 lasers lens; Potassium chloride crystals; Arsenic sulfide film; Lithium fiuoride film; Lead fluoride film; Wood processing; 硫化ヒ素薄膜; 炭酸ガスレ-ザ用窓; 塩化ナトリウム; フッ化鉛; 硫化砒素; 炭酸ガスレ-ザ用鏡; 窒化チタン; 赤外用薄膜; プラズマCVD; ゲルマニウム; カルコゲン化物; 炭酸ガスレーザ

1. Preparation of KC1 and NaC1 crystals. The growth of KC1 crystals, 80phix70mm, was carried on from the liquid by Automatic pull-up device TK-P1. The growth temperature was controlled as follows :Also, Nac1 crystal was formed on the same method.2. Fabrication of lens. The crystals were polished with the abrasives (Water, Liquid paraffin, Ethyl alcohol, Carborundum #500, 800, 1200, and Alumina 0.05 mu) and the dishes to form the lens of 5o and 60 mm focal distances, 60 and 70 mm in diameter, and 28 and 32mm in thickness.3. Thin film coating. Thin films on the surface of crystals were prepared better by PVD than plasma-assisted CVD to preserve the crystal lens from deliquescence and breakdown. The transmittance of film-coated lens was measured at 10.6mum in wavelength as follows :4.0.80-1.0mm of a hole was bored at high speed in the planks such as melapi wood and polyvinyl chlor using 17.5W cw CO_2 laser device (Assit gas N_2 : 2Kg/cm^2, XY-table speed : 300mm/s) with KC1//LiF lens. It is found that the present KC1//LiF can be employed instead of zinc selenide CO_2 lasers lens.

1.KC1和NaC1晶体的制备。 KC1晶体80phix70mm的生长是通过自动上拉装置TK-P1在液体中进行的。生长温度控制如下：同样的方法，形成Nac1晶体。 2．镜片的制作。用磨料（水、液体石蜡、乙醇、碳化硅#500、800、1200和氧化铝0.05μ）和培养皿对晶体进行抛光，形成焦距5o和60mm、直径60和70mm的透镜，厚度为28和32mm。3．薄膜涂层。通过 PVD ​​比等离子体辅助 CVD 更好地在晶体表面制备薄膜，以防止晶体透镜潮解和损坏。在10.6μm波长下测量镀膜镜片的透过率如下：使用17.5W CW CO_2激光装置（Assit）在melapi木和聚氯乙烯等木板上高速钻4.0.80-1.0mm的孔。气体 N_2 : 2Kg/cm^2, XY 工作台速度 : 300mm/s) with KC1//LiF 镜片。发现现有的KC1//LiF可以代替硒化锌CO_2激光器透镜。

项目成果

Shigeaki Nakamura: "Interfaces in Composite Materials" The 4th Conference of Material Recycle System at Government Industrial Research Institute, Shikoku. (1991)

Shigeaki Nakamura：“复合材料中的界面”第四届材料回收系统会议，四国政府工业研究所。

中村茂昭: "MECHANICAL AND OPTICAL PROPERTIES OF TiN CVDーFILM ON CERAMIC" Chemistry Express. 5(5). (1990)

Shigeaki Nakamura：“陶瓷上 TiN CVD 薄膜的机械和光学特性”Chemistry Express 5(5)。

吉岡捷爾: "高真空蒸着によるGe_<1-x>Se_x薄膜の形成と電気的光学的特性" 高松工業高等専門学校研究紀要. 25. 65-70 (1990)

K. Yoshioka：“高真空沉积Ge_<1-x>Se_x薄膜的形成及其电学和光学性质”高松国立技术学院研究公报25. 65-70 (1990)。

中村 茂昭: "複合材料の境界面について" 複合材料の再利用システム技術第4回研究会通産省四国工業技術試験所. (1991)

中村茂明：《关于复合材料的界面》通产省四国产业技术综合研究所复合材料再利用系统技术第四研究组（1991年）

吹田義一: 溶接学会論文集. 7(4). (1989)

Yoshikazu Suita：《焊接学会会议录》7(4) (1989)。