Vacuum gauge available from high vacuum to beyond atmospheric pressure based on leakage of surface acoustic wave propagating on ball to surrounding gases.

基于球上传播到周围气体的表面声波的泄漏，真空计可从高真空到大气压以上。

• 批准号: 24656060
• 负责人: YAMANAKA Kazushi
• 金额: $ 2.58万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2012
• 资助国家: 日本
• 起止时间: 2012-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-24656060/
• 关键词: 弾性表面波; 漏洩減衰; SAWセンサ; 真空計; 圧力計

The pressure dependence of the leaky attenuation was measured using ultra-long propagation of naturally collimated surface acoustic wave (SAW) in a ball SAW device and the realization of the vacuum gauge available from beyond atmospheric pressure was attempted. The ball SAW device with an interditgital transducer of Al film, useful for suppressing the scattering, succeeded in measuring the waveform after propagating 1 m by S/N of 20 at 100 kPa in N2. Moreover, precise measurement of the attenuation was succeeded by fitting an amplitude decay curve to an exponential function. The leaky attenuation is measured by subtracting extraneous attenuation independent of the pressure. As a result, it was observed that the pressure dependence was linear in the pressure range from 300 kPa down to 0.03 kPa. From these results, the foundation of the pressure gauge available beyond atmospheric pressure was established based on the measurement of the leaky attenuation by the ball SAW device.

通过在球锯装置中自然准直的表面声波（SAW）的超长传播测量漏水的衰减的压力依赖性，并尝试了从大气压中实现真空仪的实现。带有Al膜的跨牙胶换能器的球看到的装置可用于抑制散射，在N2中的100 kPa下，在100 kPa传播1 m的s/n后成功地测量了波形。此外，通过将振幅衰减曲线拟合到指数函数来成功进行衰减的精确测量。渗漏的衰减是通过与压力无关的无关衰减来测量的。结果，观察到压力依赖性在压力范围内是线性的，从300 kPa降至0.03 kPa。从这些结果来看，基于球锯装置对漏水的衰减，建立了超出大气压力的压力表的基础。

项目成果

水分濃度センサ

水分浓度传感器

• 发表时间: 2013

Characterization of MATERIALS vol.3,ULTRASONIC ATOMIC FORCE MICROSCOPY

材料表征第 3 卷，超声波原子力显微镜

• 发表时间: 2012
• 作者: Kazushi Yamanaka;Toshihiro Tsuji
• 通讯作者: Toshihiro Tsuji

Detection of Trace Water Vapor Using SiOx-Coated Ball SAW Sensor

使用 SiOx 涂层球 SAW 传感器检测痕量水蒸气

• 发表时间: 2013
• 作者: Kosuke Takayanagi;Shingo Akao;Takayuki Yanagisawa;Noritaka Nakaso;Yusuke Tsukahara;Satoshi Hagihara;Toru Oizumi;Nobuo Takeda;Toshihiro Tsuji;Kazushi Yamanaka
• 通讯作者: Kazushi Yamanaka

Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph

• DOI: 10.1143/jjap.51.07gc24
• 发表时间: 2012-07
• 期刊: Japanese Journal of Applied Physics
• 影响因子: 1.5
• 作者: T. Iwaya;S. Akao;Toshihiro Sakamoto;T. Tsuji;N. Nakaso;K. Yamanaka

Measurement of Trace Moisture by Differential Operation of Dual Ball SAW Sensors

通过双球 SAW 传感器的差分操作测量微量水分

• 发表时间: 2012
• 作者: Satoshi Hagihara;Tosihiro Tsuji;Toru Oizumi;Shingo Akao;Kosuke Takayanagi Tsuneo Ohgi;Takayuki Yanagisawa;Noritaka Nakaso;Kazushi Yamanaka
• 通讯作者: Kazushi Yamanaka