Increase of process reliability of ultra-precision cutting through direct temperature measurement in cutting parts form single crystal diamond by use of Boron-doping

通过硼掺杂对单晶金刚石切削部件进行直接温度测量，提高超精密切削的工艺可靠性

• 批准号: 317330168
• 负责人: Professor Dr.-Ing. Eckart Uhlmann
• 金额: --
• 依托单位: Fachgebiet Werkzeugmaschinen und Fertigungstechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2016
• 资助国家: 德国
• 起止时间: 2015-12-31 至 2023-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/317330168?language=en
• 关键词: Increase; process; reliability; ultra; precision

Ultraprecision machining is an established process for manufacturing of optical components for automotive, medical or aerospace applications. The use of single crystalline diamond tools (SCD) with cutting edge radius rβ ≤ 50 nm realise optical and functional surfaces such as mirrors, gratings or lenses. Despite the high mechanical hardness of diamond, there are wear phenomena during the cutting process. To characterize und interpret the wear processes of the diamond in the cutting zone, cutting temperatures need to be analysed. Currently, the temperature on a diamond tool is not fully investigated. The lack of suitable temperature measurement methods regarding resolution and response time are the reason for this new approach. The aim of the project is to measure the temperature in the cutting zone of the diamond. This is done by the use of the electrosensory features of the ion beam boron-doped diamond tool which enables a direct measurement in the cutting zone of the diamond tool without delay time. The results from the first working periode indicates that the basic operability from ion implanted diamond tools to measure the temperature is possible. Yet, there is no possibility to measure the temperature in the cutting zone since the distribution of the Boron is too inhomogeneous. Therefore, the aim of the second working periode is to use a more accurate method to introduce structures with a defined shape into the diamond. The advantages from this method are a higher sensitivity of the temperature measurement in the cutting zone, avoidance of strong bursts of the diamond and a better grindability. The work programm includes an investigation of the features and characteristics of the boron-doped structures and of a possible workwindow for the ultra precision cutting process. A complete measurement setup has to be designed and developed to determine the temperature in the cutting zone. Building on this, experimental investigations are conducted which examine the temperature in the cutting zone. Simultaneously, FEM-simulations are carried out to verify the results.

Ultraprecision加工是制造用于汽车，医疗或航空航天应用的光学组件的既定过程。使用带状半径Rβ≤50nm的单晶钻石工具（SCD）实现了光学和功能表面，例如镜子，光栅或镜片。尽管钻石的机械硬度很高，但在切割过程中仍然存在磨损现象。为了表征UND解释切割区中钻石的磨损过程，需要分析切割温度。目前，钻石工具上的温度尚未得到充分研究。缺乏有关分辨率和响应时间的适当温度测量方法是这种新方法的原因。该项目的目的是测量钻石切割区的温度。这是通过使用掺杂钻石工具在钻石工具的切割区的直接测量的离子束硼的电感特征来完成的。第一个工作期的结果表明，可以从离子植入的钻石工具中的基本操作来测量温度。然而，由于硼的分布过于不均匀，因此没有可能测量切割区的温度。因此，第二个工作期的目的是使用更准确的方法将其定义形状的结构引入钻石中。该方法的优点是切割区中温度测量的敏感性更高，避免了钻石强烈的爆发以及更好的研磨性。该工作计划包括涉足硼掺杂结构的特征和特征的投资，以及用于超精确切割过程的可能的工作风格。必须设计和开发完整的测量设置，以确定切割区的温度。在此基础上，进行了实验研究，检查了切割区的温度。同时，进行了模拟以验证结果。