Increase of process reliability of ultra-precision cutting through direct temperature measurement in cutting parts form single crystal diamond by use of Boron-doping

通过硼掺杂对单晶金刚石切削部件进行直接温度测量，提高超精密切削的工艺可靠性

• 批准号: 317330168
• 负责人: Professor Dr.-Ing. Eckart Uhlmann
• 金额: --
• 依托单位: Fachgebiet Werkzeugmaschinen und Fertigungstechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2016
• 资助国家: 德国
• 起止时间: 2015-12-31 至 2023-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/317330168?language=en
• 关键词: Increase; process; reliability; ultra; precision

Ultraprecision machining is an established process for manufacturing of optical components for automotive, medical or aerospace applications. The use of single crystalline diamond tools (SCD) with cutting edge radius rβ ≤ 50 nm realise optical and functional surfaces such as mirrors, gratings or lenses. Despite the high mechanical hardness of diamond, there are wear phenomena during the cutting process. To characterize und interpret the wear processes of the diamond in the cutting zone, cutting temperatures need to be analysed. Currently, the temperature on a diamond tool is not fully investigated. The lack of suitable temperature measurement methods regarding resolution and response time are the reason for this new approach. The aim of the project is to measure the temperature in the cutting zone of the diamond. This is done by the use of the electrosensory features of the ion beam boron-doped diamond tool which enables a direct measurement in the cutting zone of the diamond tool without delay time. The results from the first working periode indicates that the basic operability from ion implanted diamond tools to measure the temperature is possible. Yet, there is no possibility to measure the temperature in the cutting zone since the distribution of the Boron is too inhomogeneous. Therefore, the aim of the second working periode is to use a more accurate method to introduce structures with a defined shape into the diamond. The advantages from this method are a higher sensitivity of the temperature measurement in the cutting zone, avoidance of strong bursts of the diamond and a better grindability. The work programm includes an investigation of the features and characteristics of the boron-doped structures and of a possible workwindow for the ultra precision cutting process. A complete measurement setup has to be designed and developed to determine the temperature in the cutting zone. Building on this, experimental investigations are conducted which examine the temperature in the cutting zone. Simultaneously, FEM-simulations are carried out to verify the results.

超精密加工是汽车、医疗或航空航天应用光学部件的成熟工艺，使用切削刃半径 rβ ≤ 50 nm 的单晶金刚石刀具 (SCD) 可以实现镜子、光栅或透镜等光学和功能表面。尽管金刚石具有较高的机械硬度，但在切割过程中仍存在磨损现象，为了表征和解释金刚石在切割区域的磨损过程，目前需要对切割温度进行分析。金刚石工具尚未得到充分研究。该新方法的原因是缺乏合适的温度测量方法。该项目的目的是测量金刚石切割区域的温度。利用离子束掺硼金刚石工具的电传感特性，可以在金刚石工具的切削区域进行直接测量，无需延迟时间。第一个工作周期的结果表明，离子注入金刚石工具测量的基本可操作性。然而，温度是可能的。由于硼的分布太不均匀，无法测量切割区域的温度，因此，第二个工作阶段的目标是使用更准确的方法将具有限定形状的结构引入金刚石中。该方法具有更高的切削区域温度测量灵敏度、避免金刚石的强烈爆发以及更好的可磨性。该工作计划包括对硼掺杂结构的特征和特性以及可能的工作窗口的研究。超精密切割必须设计和开发完整的测量装置来确定切削区域的温度，同时进行实验研究来检查切削区域的温度。 。