NSF MRI Track 2: Acquisition of an Electron Beam Lithography and Imaging System for Research, Education, and Training

NSF MRI 轨道 2：采购用于研究、教育和培训的电子束光刻和成像系统

• 批准号: 2320098
• 负责人: Francesca Cavallo
• 金额: $ 194.44万
• 依托单位: University of New Mexico
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2023
• 资助国家: 美国
• 起止时间: 2023-09-01 至 2026-08-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2320098&HistoricalAwards=false
• 关键词: NSF; MRI; Track; Acquisition; Electron

This MRI proposal seeks acquisition of an electron-beam lithography (EBL) system to support education and research at the University of New Mexico (UNM) and surrounding regions. UNM is a Carnegie R1, Minority-Serving Institution with a student body that is approximately 50% Hispanic and 12% American Indian, and this proposal leverages this unique environment to train students from historically underrepresented backgrounds in EBL and its applications. The EBL system will be installed at the Center for High Technology Materials (CHTM), a center with a 40-year record of leadership in photonics and semiconductor research that serves a broad range of internal and external researchers.Intellectual Merit:Nanofabricated devices are at the heart of numerous fields of science and engineering, ranging from photonics to biochemistry and quantum technologies. EBL is the workhorse tool in nanofabrication, and regular access to high-quality EBL is a requirement for many nanoscience research projects. At UNM, over fifteen PIs in multiple disciplines (e.g., Electrical, Mechanical, Chemical Engineering, Physics, and Chemistry) use EBL. In quantum technology, UNM researchers use EBL-defined devices to build a fundamental understanding of the potential, scalability, and limits of quantum devices. In nanophotonics, EBL enables UNM research in areas from molecular chemistry to solar cell engineering. In nanomechanics, UNM researchers use EBL in developing new imaging, sensing, and lithography techniques. Broader Impacts:The EBL system will be used to provide training to graduate students in EBL-enabled research. EBL is also being integrated into UNM undergraduate nanophotonics and nano-electronics courses. The EBL system provides students with advanced technical workforce training for academia, national labs, and the semiconductor, photonics, and quantum technology industries. Additionally, the co-PIs host the QU-REACH program, a summer research experience in Quantum Technology for New Mexico undergraduates, with a diverse student intake. Integrating EBL into this effort will enhance the participants' recruitment prospects and training experience. CHTM also hosts year-long service learning experiences and summer workshops for high school students and teachers, mostly from economically disadvantaged schools in Albuquerque. These students and teachers will participate in EBL-enabled research and observe the tool in action.This project is jointly funded by the Major Research Instrumentation (MRI) program and the Established Program to Stimulate Competitive Research (EPSCoR).This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该 MRI 提案寻求购买电子束光刻 (EBL) 系统，以支持新墨西哥大学 (UNM) 及周边地区的教育和研究。新墨西哥大学是一所卡内基 R1 少数族裔服务机构，其学生群体中大约有 50% 是西班牙裔，12% 是美洲印第安人，本提案利用这一独特的环境来培训 EBL 及其应用领域历史上代表性不足的背景的学生。 EBL 系统将安装在高技术材料中心 (CHTM)，该中心在光子学和半导体研究领域拥有 40 年的领先记录，为广泛的内部和外部研究人员提供服务。从光子学到生物化学和量子技术等众多科学和工程领域的核心。 EBL 是纳米制造中的主力工具，定期获得高质量的 EBL 是许多纳米科学研究项目的要求。在新墨西哥大学，多个学科（例如电气、机械、化学工程、物理和化学）的超过 15 名 PI 使用 EBL。在量子技术方面，新墨西哥大学研究人员使用 EBL 定义的设备来建立对量子设备的潜力、可扩展性和局限性的基本了解。在纳米光子学领域，EBL 使新墨西哥大学能够在从分子化学到太阳能电池工程等领域进行研究。在纳米力学领域，新墨西哥大学研究人员使用 EBL 开发新的成像、传感和光刻技术。更广泛的影响：EBL 系统将用于为研究生提供 EBL 支持的研究培训。 EBL 还被纳入新墨西哥大学本科纳米光子学和纳米电子学课程。 EBL 系统为学术界、国家实验室以及半导体、光子学和量子技术行业的学生提供先进的技术劳动力培训。此外，联合 PI 还主持了 QU-REACH 项目，这是一项面向新墨西哥州本科生的量子技术暑期研究体验项目，招生对象多种多样。将 EBL 纳入这项工作将增强参与者的招聘前景和培训体验。 CHTM 还为高中生和教师举办为期一年的服务学习体验和夏季研讨会，其中大部分来自阿尔伯克基的经济困难学校。这些学生和教师将参与 EBL 支持的研究并观察该工具的运行情况。该项目由重大研究仪器 (MRI) 计划和刺激竞争性研究既定计划 (EPSCoR) 共同资助。该奖项反映了 NSF 的法定使命通过使用基金会的智力优点和更广泛的影响审查标准进行评估，并被认为值得支持。